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AST is a co-partnership between three companies; RCH Associates, Phoenix Thermal Systems and DS Fibertech, all major suppliers of Thermal Processing systems and ancillaries to the semiconductor and high technology industries. Link to manufacturer’s web site; www.ast-america.com 
| HORIZONTAL FURNACE SYSTEMS: | HIGH PURITY GAS SYSTEMS: | ASTRA CONTROL SYSTEM: |
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RCH Associates specializes in new LPCVD/Diffusion systems as well as replacement OEM gas systems (Thermco, Bruce, Tempress, ACS, etc.) fully retrofittable into existing or remanufactured source cabinets.
RCH’s portfolio of products and capabilities extends from basic Bench Top Furnaces or Research Grade systems to high production, full capability horizontal stacks | 
- Custom or customer specified system design
- All gas systems welded by a computer controlled automatic orbital welder in a modern cleanroom
- All gas systems are helium leak checked by mass spectrometer to 5 X 10-10 ATM cc/sec
- Electropolished 316L stainless steel or C-22 Hastelloy tubing
- RA finish of 5 - 30 micro inches
- 316L or 316L-VAR butt-weld and face-seal fittings
- Intensive quality assurance testing
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The ASTRA CONTROL SYSTEM provides Ethernet-linked, integrated controls with touch screen graphical simplicity. Easy-to-use, safe and powerful ASTRA maintains process repeatability with full data acquisition and unsurpassed computerized operation and maintainability.
ASTRA PROVIDES… - Vastly accelerated processing
- Instantaneous control response
- Extensive data storage/rapid retrieval
Compact Computer Power at the Tube….
Intel® CoreTM 2Duo Processor
DDR II RAM
High Capacity Hard Drive |
Link to manufacturer’s web site: www.rchassociates.com 
Manufactures vertical furnace systems for diffusion and LPCVD – provides process technology support | VERTICAL FURNACES | FLUID STREAM VERTICAL OXIDATION CHAMBER | EQUIPMENT FRONT END MODULE OPTIONS WITH SELECTIVE ROBOTICS |  |  |  |
The Maricopa Vertical Thermal Reactor clusters two (2) independently operating chambers into one (1) compact system should you require compatible chambers for skyrocketing throughputs or distinctive chambers for dynamic process integration. . Maricopa enables dynamic Diffusion, Oxidation and LPCVD process performance and integration. Execute precise control through reduced chamber volumes resulting in enhanced uniformity. Maricopa process technology is set apart by FluidStrain laminar fluid control resulting in precise chamber diffusion dynamics. Link to manufacturer’s web site: www.pts-america.com 
Manufacturers of Electric Heating Elements and Advanced Ceramics for Semiconductor Wafer Fabrication  Horizontal and Vertical Furnace Chambers
“Vulcan” High Temperature rated for 1350 °C
“Hercules” High Temperature rated for 1300 °C
“Apollo” Low Temperature rated from 400 °C to 1000 °C
“Mercury” Low Mass models rated for 1250 °C
HEATING ELEMENT REFURBISHMENT SERVICE TEL ASM SVG THERMCO KOKUSAI TEMPRESS In addition to a full line of new equipment, DSF also offers a repair service and replacement parts for used equipment. Reconditioned Furnaces are also available. 
DS Fibertech offer both high and low flow torch elements and an extensive line of replacement torches for most major brands | 
Soft Collars and Heat Blocks Ceramic Coatings | 
Vestibule Blocks and End Chamber | 
Vacuum Formed Heaters | 
Vacuum Formed Shapes and Die Cut Gaskets |
Link to manufacturer’s web site: www.itp-dsf.com
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