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Ovens , Thermal Processing systems |
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Integrated Temperature Processing Systems.
ATSI supplies simple convection or vacuum ovens through to fully automated thermal processing systems with robotics and Class 1 SMIF interfacing. Applications include Semiconductor, MEMs, Medical, Biotech, Test, Packaging, Flat Panel, MCM, Battery Curing and R & D in general.
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DELTA SERIES
3 chamber sizes, convection or vacuum
Designed for parts storage & general.
Forced air system
Computer control.
250C operation
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OMEGA SERIES
3 chamber sizes, convection or vacuum
Designed for parts storage, film drying & general.
Class 10
Computer control
Full HMI interface
Include vacuum gate valve
Bar code option
250C operation
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GEMINI SERIES
Three chamber sizes
Designed for vacuum bake, HMDS coating and image reversal
Class 10 operation
Class 100 Operation
HMDS & Image Reversal Operation
Computer control
Full HMI interface with flat panel touch screen
18 different models
Include vacuum gate valve
Bar code reader option
Adaptable for automation operation
Temperatures to 450C
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ALPHA SERIES
3 chamber sizes
Designed for parts storage, flat panel
Class 10
Computer control
Full HMI interface
Include vacuum gate valve
Bar code read option
250C operation
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SAPPHIRE WORK CELL
One robotic handler
SMIF port
Single wafer transport
Robotic handling of cassette
Single or dual temperature process chambers
Bar code reader
Options for 200/300mm
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OMICRON CMP TRANSFER
One size transfer cell
One robotic handler
High laminar air flow
Wafer transfer system
Robotic handling of cassette
Bar code reader
All parameters monitored through the HMI
Fits with factory automation
Convertible 150 to 300mm
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LAMBDA SERIES
Two tube sizes standard (others on request)
Applications include Diffusion, Oxidation, Poly, Nitride, TEOS and Anneal.
Tabletop size for ease of integration
Turnkey system with quartz ware and gas panel
Computer control
Full HMI interface with flat panel touch screen
12 different models compatible with all safety standards
208 V 3-phase power (others on request)
Temperature to 1200C
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EPSILON SERIES
The Epsilon Series has been designed to provide a stand-alone high-tech processing system for the medical industry. This system provides two curing methods – vacuum curing and forced air curing. It is ideal for processing a wide range of medical items such as filters, rubber stoppers, and syringes. The Omnisoph© control system is an integral part of the Epsilon Series.
3 chamber sizes Designed for up to Class 100
Advanced HMI Control
Temperatures to 250°C |
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PHOENIX SERIES
The Phoenix Processing Series has been designed for industrial applications to provide stand-alone vacuum processing systems for battery manufacturing. The systems are custom made and the chamber sizes vary based on customer needs. It is designed with a pass-through chamber thereby increasing the efficiency of the process for the customer and isolating the dry-room from the rest of the process. It provides vacuum curing for lithium batteries.
Advanced HMI Control
Temperatures to 180°C
Pass-Through Vacuum System
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Manufacturers Website: http://www.atsi-usa.com
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