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Wet benches, Fume Hoods, Chemical Distribution Systems |
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Chemical Safety Technology, Inc. has been one of the global technology leaders in design, development and manufacturing of Chemical Dispense Systems since 1986.
CSTI’s focus is on bulk and local chemical dispense, Kem-Karts for Slurry and chemical transport, waste collection and bottle wash stations and custom wet benches. All CSTI products have been designed and manufactured to ensure a safer and better management of hazardous waste material.
 | BULK CHEMICAL DISPENSE SYSTEMS Solvent & Acid Versions
FM-4910 compliant material cabinet / enclosure
PLC controls with Operator Interface Panel (OIT/HMI)
High Purity materials for fluid paths
Fire suppression for the solvent systems
High reliability, more than 2500 hours MTBF
Compliance with Semi and CE rules and regulations
Third party Certified |
| SLURRY MIX & DISPENSE SYSTEMS | TOTAL FACILITY CHEMICAL MANAGEMENT WITH SUPERVISORY COMPUTERS(SCADA) |  |  | | SOLVENT DISPENSE UNITS | CUSTOM MIX & BLEND SYSTEMS |  |  | | CHEMICAL DISPENSE CARTS | WASTE REMOVAL CARTS |  |  |
| PLATING STATIONS Plating Stations (Manual, Semi-Auto, Auto) with a standard or a unique fixture less plating cell (Patent Pending) Other Capabilities; Robotic Cleaning Lines
Mini-Environments, Class 10 to 100000
Custom Wet Process Benches
Custom HEPA or ULPA Carts
Portable Chemical Handling Equipment
Chemical Dosing Systems, Feed and Bleed |  |
Manual Process Station The Cost Effective Gen1 VLF
is a flexible, modular system suitable for a wide variety of cleaning, etching and stripping applications for bare & reclaimed silicon wafers, solar cells, IC devices, MEMS and photomasks. Solar cell process programs: - Texturization (acid and alkaline)
- EPI Release
- Inline Configuration
Cell Sizes: 100 to 210mm
Cell Thickness: ≥ 150 μm
Cell Type: Mono or Multi Crystalline Typical Design
Efficient exhaust flow with maximum operator safety
Curved exhaust baffle eliminates dead zones
Built-in side shields and Lip exhaust
Modular design for flexibility and Dedicated Controls
High Reliability: >2000 Hours MTBF |  |
Rotary Wet Process Station  The Cost Effective Batch Processing Semi-Auto Gen2
Batch-immersion with customized processing, low cost of ownership, maximum flexibility, smaller footprint CST Vertical Laminar Flow (VLF) is a flexible, modular system suitable for a wide variety of cleaning, etching and stripping applications for bare & reclaimed silicon wafers, solar cells, IC devices, MEMS and photomasks. Solar cell process programs: - Texturization (acid and alkaline)
- EPI Release
- High Throughput (HTP)
- Inline Configuration
Cell Sizes: 100 to 210mm
Cell Thickness: ≥ 150 μm
Cell Type: Mono or Multi Crystalline - Modular design for flexibility and ease of reconfiguration
- Front or Rear maintenance access
- Flush mount capability
- Designed to meet NFPA,NEC and SEMI PC Based Control System standards.
- Operator Interface Terminal (OIT)
- Ethernet Based Distributed Control System
- Host SECS-GEM interface
- Data Logging and History Log (real-time)
- Event and Recipe Driven Process Controls
- High Reliability: >2000 Hours MTBF
- Bulk chemical supply interface
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Fully Automated Process Stations. The Future of Batch Processing Automated Gen3
Batch-immersion with customized
processing, low cost of ownership,
maximum flexibility, smaller footprint Gen3 is a flexible, modular system suitable for a wide variety of cleaning, etching and stripping applications for bare & reclaimed silicon wafers, solar cells, IC devices, MEMS and photo masks. Solar cell process programs: - Texturization (acid and alkaline)
- EPI Release
- High Throughput (HTP)
- Inline Configuration
Cell Sizes: 100 to 210mm
Cell Thickness: ≥ 150 μm
Cell Type: Mono or Multi Modular design for flexibility and ease of reconfiguration - Front or Rear maintenance access
- Flush mount capability
- Designed to meet NFPA, NEC and SEMI standards
- PC Based Control System
- Operator Interface Terminal (OIT)
- Ethernet Based Distributed Control System
- Host SECS-GEM interface
- Data Logging and History Log (real-time)
- Event and Recipe Driven Process Controls
- High Throughput (HTP)
- High Reliability: >1500 Hours MTBF
- Bulk chemical supply interface
- Up to class 1 mini environment
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Link to manufacturer’s web site: http://www.kemsafe.com/
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