Sistem Technology

Fortrend has supplied automation equipment for semiconductor device manufacturers, photo mask suppliers and original equipment manufacturers (OEM’s).

• Saves valuable fab floorspace

• Rotating end effector ensures flexible integration

• Adjustable loading height provides ergonomic efficiency

• Diamond-pin interface plate minimizes downtime

• Built-in mini-environment and clean airflow system maintain sub Class 1 environment

PLM-C1™, Pod Lift Mechanism,
POM TM Pod Opener Mechanism.

The Fortrend PLM is a simple, reliable Pod Lift Mechanism designed to open 200mm SMIF pods by lifting the pod cover.

The POM™ opens SMIF boxes and raises the pod cover for access to the cassette. The small footprint allows the system to be placed near equipment or anywhere access to cassettes is required.

Mass Wafer Transfer Systems.

• Fully automated and reliable.

• Reduced contamination transferring wafer lots.

• Small footprint.

• These systems can be integrated into process equipment for high throughput or used as stand alone equipment.

• Several configurations for wafer size up to 300mm.

i-Cell® Bare Reticle Stockers

Haze Control Solution in 193nm Lithography Process
Features:
Effective XCDA or N2 sealed storage chambers to control reticle haze problems
High density, small footprint, and lowest cost of ownership
Fully automated robotic reticle handling system
Flexible storage capacity (150 to 900 reticles)
Advanced reticle management software
Integrated OCR/turntable station
Optional RFID/IR reader/writer
Dual RSP load ports S2/S8/CE Certified

Lamina-200 Series Reticle Sorters

Fully automated mask/reticle transfer systems
Better than ISO-Class 2 cleanliness (<5 airborne particles @ >= 0.1 microns
Integrated ionizers to meet SEMI E78 ESD “Level1” standard
Meet CE, SEMI S2/S8 standards
Flexible configuration with fully automated box openers: 150mm and 200mm
SMIF pods (single and multiple), ASML, Nikon, Cannon, HOYA, Toppan, DNP, TMC, ShinEtsu, DMS, and others, (available in any combinations)
Integrated Inspection modules: Blight light review stations (>2um) and Automated particle detection systems (>5um)
Optional bare mask storage buffers
Other options: BCR/OCR reader, RFID reader/writer, Turn tables, SECS/GEM Interface

Fortrend eRack System

SMIF 200 mm low cost racking solutions
Single and Multiple SMIF 150 racks
Fortrend’s eRack system integrated with InforTrac ID tracking Solutions
RFID, IR, Barcode available
Win XP embed system on Cell
PIP detecting system
Movable design/ Custom configurations
SECS I/SECS II
Data acquisition
Optional LED colour light indicators/Light Tower

RFID Modules for SMIF/Cassette Load Ports

All Fortrend PLUS-500 and other SMIF loaders readily support RFID reader upgrades

Standard and custom RFID reader modules are also available to retrofit existing SMIF loaders from Asyst, Brooks or other vendors to read RFID tags