Sistem Technology

Protecting Vacuum Systems, Pumps, Exhaust Lines and the Environment.

MV Multi-Trap® High Capacity, High Efficiency, Vacuum Inlet Trap.

Protects oil-sealed vacuum pumps and dry vacuum pumps Removes corrosive and abrasive particles that can destroy your vacuum pump Processes such as TEOS, NITRIDE, POLY, LTO, HTO, and PLASMA Modular design makes the unit easier to disassemble and clean Element replacement is fast and easy Water or refrigerant cooling options are available

The MASS-VAC Multi-Trap™ Extends Pumping System Preventative Maintenance periods by up to 2 times or more. Common Applications are; LPCVD, PECVD, METAL ETCH, MOCVD, ION IMPLANT, HVPE,

Posi-Trap® Foreline Trap.

Ensures positive flow with no “blow-by” All stainless steel construction Straight-thru and right-angle styles offered Wide variety of filter elements to choose from

This versatile foreline trap prevents contaminants from entering the vacuum pump and protects the system from pump fluid contamination.

Midi-Mist™ Oil Mist Eliminator.

Stainless steel construction resists corrosion Protects environment from vacuum pump exhaust Drain plug for recovering pump fluids Simple disassembly and cleaning

For Use on Vacuum Pumps with inlet ports up to 2” Diameter.

Maxi-Mist™ High Capacity Oil Mist Eliminator.

Stainless steel construction resists corrosion High-capacity coalescing filters drain oil into a large reservoir for easy recovery Designed for large capacity vacuum pumps

For Use on Vacuum Pumps with inlet ports up to 4” Diameter (Up to 300 CFM).

Visi®Flow Oil Filtration System.

Protects your vacuum pump and pump fluid. Reduces maintenance costs. Prolongs pump and fluid life. Removes acids, alkalis, moisture, particles and other corrosive or contaminating materials.

A compact, portable, self-contained system for continuously filtering mechanical vacuum pump fluids.

Link to manufacturer’s web site: www.massvac.com