 | Process Technology's high purity products for wet process manufacturing applications include: fluoropolymer and quartz UPDI water heaters, inline chemical heaters, solvent heaters, nitrogen heaters, constant temperature baths, electric immersion heaters, inline heat exchangers, and high temperature filter chambers. Industries served include Semiconductor, FPD, MEMS, Nanotechnology, LCD, Biomedical and Pharmaceutical. These products are assembled in a Class 100 (ISO 5) cleanroom to exacting standards. | | DI WATER HEATERS |  | Lufran Fluoropolymer Water heaters: Proven technology for UPDI heating applications. Patented purged element design offers exceptional MTBF. Conforms to Semi standards and CE compliant. Sizes available up to 260kW. Available patented DACTM software provides accurate temperature control for different flow and temperature requirements. |  | H2OT SHOT™ Quartz Water Heaters: Resistive element design for maximum life with no bulbs to ever change out. Ultra pure quartz wetted parts for maximum cleanliness. Conforms to Semi standards and CE compliant. Sizes available up to 144kW. Available patented DACTM software provides accurate temperature control for different flow and temperature requirements. |  | TytanTM Water Heaters: Titanium elements for long life. This heater is a low cost, high quality alternative for heating non-critical DI water applications. Semi and CE compliant configurations available upon request. Sizes available up to 144kW. Wall mounted up to 72kW. | | IN-LINE CHEMICAL HEATERS |  | TIH Series, Fluoropolymer Chemical Heaters: Durable inline heater for virtually any chemistry including: HF and KOH. |  | H2OT SHOTTM Quartz Chemical Heaters: All quartz wetted parts. Excellent choice for SC1, SC2, and other quartz compatible applications. Exceptionally easy maintenance. |  | QKV Series, QMaxTM In-line Chemical Heaters: All quartz and PVDF wetted parts. Vertically mounted. Excellent choice for SC1, SC2, and other quartz compatible applications. Long lasting resistance heating element. | | SOLVENT/NITROGEN HEATERS |  | SoltaN2TM Inline Solvent/Nitrogen Heaters: Electric heater with stainless steel construction designed for safe heating of NMP, EKC 265, EKC 830, ACT 690, ACT 970 and other solvents. Also heats nitrogen or other inert gases up to 200°C (392°F). | | CONSTANT TEMPERATURE BATHS |  | SB/RB/NE Series Constant Temperature Chemical Baths: All three standard bath systems include a PFA tank, temperature control, a PTFE immersion heater and redundant safeties. - SB baths are PFA chemical tanks systems designed for SC1/SC2, BOE and many other acid applications.
- RB baths add a chemical condensing coil to the SB systems for KOH and other similar applications.
- NE baths add both a condensing coil and an automatic DI water replenishment for phosphoric acid applications.
|  | Etch TechTM series, Cascade Process Baths: Non-breakable PFA tank. For use with integral in-tank heater or external inline heater. |  | FiltranTM series, Recirculating Filter Etch Baths: Polypropylene or PVDF construction for applications such as HF up to 110° C. Integral pump, filter and PTFE heater. Good choice for buffered oxide etch requirements. |  | CQDR series, Cascading Quick Dump Rinse Tank: Rapid dumping action. Polypropylene, polyethylene or PVDF tank. | | ELECTRIC IMMERSION HEATERS |  | TF series, Immersion Heaters: Patented N2 purge feature for extended service life. Compact design. |  | HX series, Immersion Heaters: Metal ground for safety. Rugged design for long life. |
Link to manufacturers web site: http://www.process-technology.com
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