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Megasonics cleaning systems, Megasonics refurbishment |
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For manufacturers of sub-micron contamination-sensitive products, ProSys' MegaSonic Cleaners provides superior cleaning performance, substantially higher reliability, and a lower cost of ownership. Megasonics are ProSys' core and only business. Our company focuses on delivering innovative technology with exceptional performance at a competitive cost. |
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Tank Systems
- Small, compact size
- Kynar®, Quartz, and Stainless Steel tanks available
- Quick Dump Rinse (QDR) tank configurations
- Wafer size up to 300 mm
- Four-sided overflow standard
- Custom sizes available
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Transducer crystal array
- Multiple crystal custom array
- Stainless Steel, PFA® coated Stainless Steel, Quartz, Sapphire, Ceramic, and other resonator materials available
- Repairable
- Continuous with Pulsed wave Operation
- Operating temperatures to 60° C
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Plate Arrays
- Custom Transducer For Your Tank Designs
- Single Wafer To 300mm Batch
- Easy To Install And Repair
- Continuous Or Pulsed Operation
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Immersible Arrays
- Quickly convert your process bath to Megasonic
- Custom built for your bath
- Installs in minutes
- Turn an Ultrasonic bath to Megasonic
- Standard and Custom sizes available
- Interfaces with the MegaPower VCO or MegaDu
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Single Substrate Cleaners
- Single Substrate Custom Tanks
- Quartz, Kynar or Stainless Steel Materials
- Wafer to 300mm, Custom to 1000mm
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Megpie Transducer
The MegPie is a Patented Radial Megasonic Array designed to apply uniform acoustic energy to a rotating substrate
- Uniform Energy Applied to Substrate
- Easy Integration into Existing Tools
- Standard and Custom Designs
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Table Top Megasonic System
- Tabletop Megasonic System
- Stainless Steel tank
- Single Wafer, Die or Special parts Cleaning
- LCD Touch Screen Operator Control panel
- 200mm Capable
- Re circulated and Filtered
- Up to 5 Watts/cm² energy density
- 400 KHz, 1, 2 or 3 MHz Options available
Options
- Temperature Control to 60° C
- Quartz insert for strong Acid and Base use
- Kynar Tank
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Repair Services
ProSys is now providing repair services for other manufacturer’s Megasonic Transducer Arrays. Utilizing our patented bonding and assembly processes, ProSys will repair your Single or Dual transducer arrays. Provide us with your failed units and have them rebuilt and tested in weeks for less than the cost of a new unit.
Link to manufacturers web site: www.prosysmeg.com
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