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Sputtering

With a long history and broad experience as a high vacuum system designer and builder, Intlvac can provide you with prototype and production thin film coatings, or a deposition or etch system for your process. Their years of experience and knowledge are the key to your success.

High Vacuum Process Systems

NANOQUEST ION BEAM ETCH

Nanoquest Pico A compact, low-cost Ion milling platform for advanced R & D

Process methods:
Ion Beam Etching (IBE) Reactive Ion Beam Etching (RIBE)

NANOQUEST ION BEAM ETCH

Nanoquest I, a compact, low cost platform for advanced Ion beam process.

Process methods:
Ion Beam Etching (IBE)
Ion Beam Sputter Deposition
Ion Beam Assisted Deposition (IBAD) Reactive Ion Beam Etching (RIBE)
Chemically Assisted Ion Beam Etching ( CAIBE)

NANOQUEST ION BEAM ETCH

Nanoquest II, Ion Beam Etch platform for wafers up to 8 inches.

Options Include:
IBS Deposition
Sputter Deposition
In-situ Camera
S.I.M.S. End-point Detection
Load-lock

NANOQUEST ION BEAM ETCH

Nanoquest III, Multi-substrate ion milling system with next-gen RF ICP ion source.

Features:
22cm RF ICP Ion Source
Up to 3×6” Planetary
S.I.M.S. End-point Detectio

NANOCHROME PHYSICAL VAPOUR DEPOSITION

Nanochrome Pico, a compact, low-cost platform for advanced Thin Film Coating.

Process Methods:
Magnetron Sputtering
E-beam Evaporation
Thermal Evaporation
Ion Assisted Deposition
Knudson Cell Evaporation

NANOCHROME PHYSICAL VAPOUR DEPOSITION

Nanochrome I, an R&D/Pilot Physical Vapour Deposition System

Process Methods:
Co-Evaporation
Multi-Layered E-beam Deposition
Ion Beam Assisted Deposition (IBAD)
Thermal Evaporation
Planar Magnetron Sputtering

NANOCHROME PHYSICAL VAPOUR DEPOSITION

Nanochrome II, an R&D/Pilot Physical Vapour Deposition System.

Process Methods:
Co-Sputtering
Ion Beam Assisted Deposition (IBAD)
RF, AC & Planar Magnetron Sputtering

NANOCHROME PHYSICAL VAPOUR DEPOSITION

Nanochrome IV, Plasma Assisted Reactive Magnetron Sputtering.

Process Methods:
Exceptional process repeatability
Stable deposition rates up to 10 Å/Sec
Very low arcing
Capable of producing films with 100+ layers
Optional load-lock operation

PECVD DIAMOND LIKE CARBON

Advantages of DLC for Infrared Optics

  • High hardness
  • Low Friction
  • Electrical Insulation
  • Resistance to Wear
  • Chemical Inertness
  • Good Thermal Conductivity
  • Optical Transparency
  • Biological Compatibility

Applications

Optics
DLC coating acts as a single-layer anti-reflection coating for high index substrates and it provides wear & chemical resistance for optical elements used in harsh environments.
- Intlvac Thin Film DLC conforms to TS1888 Wiper Test and all relevant MIL-C-48497A tests.

Bio-engineering
DLC provides advantages of bio-compatibility, wear resistance, and diffusion resistance.

Mechanical Engineering
DLC provides wear & corrosion resistance, low friction, and good thermal conductivity.

DLC on wide variety of substrates that include:

IR Optics:
- Silicon, Germanium, Chalcogenides

Plastics:
- Ultem, Polycarbonate, Polyimide, PEEK

Glass:
- Crown Glass, UVFS, SF11, Sapphire

Metals:
- Aluminium, Copper, High-carbon Steel