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Chemical Safety Technology Inc.

Unique Solutions in Wet Benches & Chemical Handling.

Chemical Safety Technology, Inc. has been one of the global technology leaders in design, development and manufacturing of Wet Processing & Chemical dispense Systems since 1987.

Their focus is bulk and local chemical dispense, (Manual/Semi-Auto/Linear) wet process stations, fume hoods, Kem-Karts for slurry and chemical transport, waste collection and bottle wash stations. All CSTI products have been designed and manufactured to ensure a safer and better management of hazardous waste material.

Manual Process Station: Gen1 VLF

CST Vertical Laminar Flow (VLF) is a flexible, modular system suitable for a wide variety of cleaning, etching and stripping applications for bare & reclaimed silicon wafers, solar cells, IC devices, MEMS and photomasks.

  • Efficient exhaust flow with maximum operator safety.
  • Curved exhaust baffle eliminates dead zones
  • Built-in side shields and Lip exhaust
  • Modular design for flexibility and dedicated controls
  • High Reliability: >2000 Hours MTBF
  • Fire suppression systems
  • DI water reclaim plenum

Semi Auto Batch Process Station: Gen2

CST Semi- Auto is a flexible, modular system suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, solar cells, IC devices, MEMS and photomasks

  • Modular design for flexibility and ease of reconfiguration
  • Front or rear maintenance access
  • Flush mount capability
  • Designed to meet NFPA, NEC and SEMI Standards
  • PC based control system
  • Operator interface terminal (OIT)
  • Ethernet based distribution control system
  • Host SECS-GEM interface
  • Data Logging and History Log (real-time)
  • Event and recipe driven process controls
  • High reliability: >2000 hours MTBF
  • Bulk chemical supply interface

Automated batch processing station: Gen3

Gen3 is a flexible modular system suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, solar cells, IC devices, MEMS and photomasks.

  • Modular design for flexibility and ease of reconfiguration
  • Front or rear maintenance access
  • Flush mount capability
  • Designed to meet NFPA, NEC and SEMI standards.
  • PC based control system
  • Operator interface terminal (OIT)
  • Ethernet based distributed control system
  • Host SECS-GEM interface
  • Data Logging and history log (real time)
  • Event and recipe drive process controls
  • High throughput (HTP)
  • High reliability: >1500 Hours MTBF
  • Bulk Chemical supply interface
  • Up to class 1 mini environment.

Chemical Dispense Systems:

CSTI manufactures chemical dispense systems that are developed to suit the client’s particular facility requirements. All the products currently offered as well as new applications can be custom designed and manufactured to meet or exceed UFC, UBC and semi-regulations.

Third party certification and CE certifications are available upon request.

Pressure dispense unit with dual tanks and auto switch over:

Multiple carboy dispense unit:

Chemical dispense units with touchscreen controls:


Chemical Mix and Dispense Systems:

Fully automatic chemical dispense units, manufactured with white polypropylene to handle acids and corrosive chemicals or slurry for CMP applications.

  • PLC based controls with touch screen operator interface panel
  • Polypropylene construction with all Teflon plumbing
  • Pulse damper for reduced chemical pulsing
  • N2 purge in chemical containers
  • Building interface
  • Automatic N2 filter purge
  • Redundant pumps
  • Dual drum configurations
  • Drum sizes to 55 gallons
  • Multiple dispense points
  • Bottle pump-out station

Dual Drum Chemical dispensing Unit:

Fully automatic chemical dispense units, manufactured with stainless steel to handle flammable or combustible solvents.

  • PLC based controls with touch screen operation
  • Durable stainless steel construction
  • Automatic CO2 fire extinguishing system
  • Pulse dampers for constant chemical flow
  • N2 purge in chemical containers
  • Building interface
  • Automatic N2 filter purge
  • Redundant loops
  • Single drum configurations
  • Multiple dispense points

Custom blending System:

Bulk Delivery Units with Day Tanks:

Dual Drum Waste Cart:

Fresh Chemical Dispense Cart:

Waste Removal Cart:

Solvent pressure Dispense system:

Solvent Dispense with CO2 fire suppression system: