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INTLVAC THIN FILM INTRODUCES PLEIADES CLUSTER SYSTEM

Intlvac Thin Film has added to its expanding system line-up with the Pleiades Cluster System. Pleiades is a modular, multi-chamber array featuring customizable configuration for complex processes under vacuum.

The Pleiades Cluster System offers the flexibility to enable the use of process modules such as:

  • Beam Etching & Sputtering
  • eBeam Evaporation - Lift Off
  • Thermal Evaporation
  • Oxide & Fluoride Evaporation
  • Magnetron Sputtering Oxides & Nitrides
  • Magnetron Sputtering Metals
  • Atomic Layer Deposition
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