INTLVAC THIN FILM INTRODUCES PLEIADES CLUSTER SYSTEM

Intlvac Thin Film has added to its expanding system line-up with the Pleiades Cluster System. Pleiades is a modular, multi-chamber array featuring customizable configuration for complex processes under vacuum.

The Pleiades Cluster System offers the flexibility to enable the use of process modules such as:

• Beam Etching & Sputtering
• eBeam Evaporation - Lift Off
• Thermal Evaporation
• Oxide & Fluoride Evaporation
• Magnetron Sputtering Oxides & Nitrides
• Magnetron Sputtering Metals
• Atomic Layer Deposition