Intlvac Thin Film introduces Pleiades Cluster System
Intlvac Thin Film has added to its expanding system line-up with the Pleiades Cluster System. Pleiades is a modular, multi-chamber array featuring customisable configuration for complex processes under vacuum.
The Pleiades Cluster System offers the flexibility to enable the use of process modules such as:
- Beam Etching & Sputtering
- eBeam Evaporation – Lift Off
- Thermal Evaporation
- Oxide & Fluoride Evaporation
- Magnetron Sputtering Oxides & Nitrides
- Magnetron Sputtering Metals
- Atomic Layer Deposition
