Sapphire MegPie


The Prosys Sapphire MegPie is a groundbreaking single-wafer Megasonic transducer designed to redefine your cleaning and sonochemical processes. Immerse yourself in a realm of innovation and efficiency, where every detail matters and every result exceeds expectations.

Particle-Neutral Sapphire Resonator

Experience immaculate processing with the Prosys Sapphire MegPie particle-neutral sapphire resonator. No unwanted particles are introduced to your processes, ensuring the purity and integrity of your output.

Patented Crystal Bond and RF Connection

Witness the culmination of cutting-edge engineering with Prosys’ patented crystal bond and RF connection. Enjoy unrivalled stability and performance that drive consistent, exceptional results.

Redundant Internal RTD Temperature Monitoring

Trust in precision with redundant internal RTD temperature monitoring. Maintain optimal conditions for your processes with confidence and ease.

Uniform Direct Acoustic Energy

Experience the perfection of uniform direct acoustic energy application. Achieve results that stand out for their consistency and precision, raising the bar for process efficiency.

Flexible Sizing Options

From 100mm to 450mm and beyond, the Sapphire MegPie offers a range of sizes to suit your specific requirements. Custom sizes are also available, ensuring a tailored solution for your needs.

Compatibility with All Processing Chemistries

Embrace versatility with a sapphire resonator that seamlessly adapts to all processing chemistries. No matter the demands of your industry, the Sapphire MegPie is ready to excel.

Increased Efficiency & Reduced Process Time

Turbocharge your operations with increased efficiency and reduced process time. The Sapphire MegPie streamlines your workflow, helping you achieve more in less time.

Savings on Process Chemistry

Witness the impact of smart technology on your bottom line. Experience reduced process chemistry usage, saving resources and optimising costs.

Maintenance-Free Design

Say goodbye to the hassle of maintenance. With no moving parts to worry about, the Sapphire MegPie offers a maintenance-free solution that keeps your operations smooth.

Brilliant Results Beyond Brushes

Embrace a future without consumables, where innovation surpasses traditional methods. The Sapphire MegPie works better than brushes, leaving behind outdated approaches.

Technical Specifications

  • Power Density: 0.05 – 2.0 Watts/cm²
  • Operating Frequency: 925 kHz (Other frequencies available on request)
  • Mounting Height: 0.02″ – 0.14″ (0.5mm – 3.5mm)
  • Process Fluid Temperature: 15°C – 60°C
  • Process Fluid Flow: 0.5 – 3.0 lpm (Depending on substrate size and RPM)
  • Operating RPM: 1 – 100
  • Nitrogen or CDA Purge: 10 lpm
  • Mounting: 3 x M6 Female Threaded Bosses
  • Compatible with IMPulse RF Electronics

Explore a vast array of supported processes, including Post-CMP Cleaning, TSV, Pre-SOIC Bond Cleaning, SU-8 Develop, Lift-Off, Resist Strip, LIGA Processes, Mask Cleaning, Etch Assist, Plating Pre-Cleaning, Pre-Plating Bubble Removal, and Post-Laser Cleaning. The Prosys Sapphire MegPie is your gateway to excellence across various domains of precision manufacturing.

Transform your processes today with the Prosys Sapphire MegPie – a testament to innovation, performance, and the future of manufacturing excellence. Discover the possibilities and elevate your operations with the MegPie’s unmatched capabilities.

Speak to a specialist

With so many permutations available, the best way for us to help you is for us to know more about what you are trying to achieve. Contact us today for no obligation help, advice and solutions for semiconductor, nanotechnology, biotechnology and any other precision engineering equipment requirements.