Wet Processing, Chemical Heaters & Megasonics

Chemical Safety Technology is a recognized leader of chemical, slurry and semi-automated wet process benches for the semiconductor and
disk manufacturing industries. The company designs, manufactures, installs and services mix/dispense and wet cleaning equipment.

Chemical Safety Technology

Wet Benches and Chemical Delivery

Available equipment:

Bulk chemical dispense systems
Slurry mix and dispense systems
Total facility chemical management with supervisory computers
Plating stations (manual, semi and auto) with a standard or a unique fixture-less plating cell
Robotic cleaning lines
Mini-environments, Class 10 to 100000
Custom wet process benches
Custom HEPA or ULPA carts
Portable HEPA or ULPA carts
Portable chemical handling equipment
Chemical dosing systems, feed and bleed
Fire suppression for the solvent systems
Wet Bench 4 robot system
Chemical Delivery system
Waste Collection System
Chemical Cart
Process Technology's high purity products for wet process manufacturing applications include: fluoropolymer and quartz UPDI water heaters, inline chemical heaters, solvent heaters, nitrogen heaters, constant temperature baths, electric immersion heaters, inline heat exchangers, and high temperature filter chambers.
Process Technology

High Purity DI water Heaters


Designed for the ultra-pure demands of high purity industries, Process Technology offers a full line of deionized water heaters designed for your most demanding applications. Sizes range from 3,000 watts up to 260,000 watts. The patented
designs incorporate unique features for superior thermal response. All DI water heaters are available in quartz or fluoropolymer wetted parts
for the most demanding high purity applications.
High purity heaters are assembled in an ISO5 (Class 100) cleanroom and its patented “purged” resistive element design offers exceptional MTBF of ten years.


The Tytan™ brand represents the safest and most reliable industrial deionized water heater on the market. Featuring a compact, self-contained heater and control package for ultra-fast heat up and superior temperature stability regardless of application, Tytan™ is available in sizes up to 144kW, wall-mounted up to 72kW. Installation is fast and easy, and the TytanTM requires virtually no maintenance.


Photovoltaic (solar cell)
HotShot Quartz Water Heater

Chemical/Gas Inline and Immersion Heaters


Inline chemical heaters are used in wet process manufacturing applications where Inline heating is preferred over immersion heating methods. Process Technology inline heaters are manufactured in fluoropolymer and high purity quartz materials with sizes up to 18,000 watts. A large variety of standard and custom configurations are available. Applications include temperatures up to 180 degrees centigrade.


Process Technology electric immersion heaters are designed for a spectrum of industrial applications from water to the demands of corrosive chemical heating, with a vast array of configurations available such as open tank, screw plug and flange. A wide variety of sheath materials ensure heater longevity regardless of the chemistry, including: fluoropolymer, quartz, titanium, 316 stainless steel, 304 stainless steel and plain steel. Immersion heater sizes range from as small as 100 watts for laboratory
environments to as large as 54,000 watts (flange heaters up to 270,000 watts) for industrial applications.

SoltaN2 system

The SH Series system is an electric inline heater designed to safely heat process gas or solvents through indirect contact instead of direct immersion. SoltaN2™ inline solvent & nitrogen heaters deliver superior temperature stability with changes in flow and offer redundant temperature sensors for safe operation.

Heat Exchangers

Our heat exchangers and heating and cooling coils are designed for the high demands of corrosive chemical heating. A wide variety of standard and custom configurations are available. Materials of construction include: fluoropolymer, titanium, 316 stainless steel, plain steel, and several exotic metals such as Zirconium.
SoltaN2 system
Heat exchanger

SiSTEM Technology Limited
Grafton Suite
Caswell Science & Technology Park
NN12 8EQ
United Kingdom


+44 (0)1327 317 621

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