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Modutek Wet Processing Equipment

Modutek Corporation has designed and built wet processing equipment in San Jose, California, since 1980. The range runs from manual wet process stations to fully automated semiconductor wet benches, together with the process tanks, rinsers, dryers and chemical handling systems that go around them, for semiconductor and MEMS manufacturing.

SiSTEM is Modutek’s distributor for the UK and Europe. We scope each bench with you and Modutek’s engineers and quote and supply it from SiSTEM, and our UK and European team installs and services it. If a bench goes down, we stay on the fault with Modutek until you confirm it’s working properly again. Contact us to talk through your process, or see the wet benches below.

Built in San Jose since 1980

Modutek keeps design and testing at one site in San Jose, California, and writes its own robotics and control software.

Manual to fully automated

Manual wet process stations, semi-automated benches with robotic transfer, and fully automated lines running programmed recipes, including dry-to-dry configurations.

Materials matched to the chemistry

Acid and base benches are built in FM4910 and solvent benches in 304 stainless steel with integrated fire suppression. PVDF and Teflon are used where purity matters, and quartz for high-temperature baths.

Megasonic and silicon carbide cleaning

Megasonic cleaning at 850 kHz to 2 MHz can be fitted to any bench type. Modutek's guidance is to characterise silicon carbide cleaning separately from silicon.

Equipment around the bench

Quick dump rinsers, IPA vapour dryers, quartz and Teflon process tanks, chemical delivery and collection systems, neutralisation systems and acid fume scrubbers.

Tested before it ships

Every bench is checked with DI water before delivery, and factory acceptance testing against your specification can be arranged. SiSTEM then installs and commissions it on site.