Cost Effective Equipment release Apogee™ 300 Bake Plate

The Apogee™ 300 is designed for process and R&D engineers requiring a bake plate for large-area substrate applications, and is capable of handling a maximum size of 300mm round or 14” square substrates.

BENEFITS

New compact design for minimized footprint
Full-color, 7-inch touch screen display
Durable benchtop design that can be converted to a flange-/deck-mountable configuration
Enhanced logging and optional programmable height control
Hot plate cover that is cool to the touch, adding extra safety benefits
Programmable exhaust
Lift pins are now a standard inclusion
DataStream™ technology as the standard interface

PROGRAMMABILITY

Touch screen interface and display
Virtually unlimited recipe storage
Virtually unlimited steps per program
Three automated bake methods: contact, vacuum, and proximity
Bake plate auto-sizing: 100mm, 150mm, 200mm, and 300mm wafers
Temperature data recording
Electronic lift pins programmable in 0.1mm increments up to 13mm
Password protection enabled

PRECISION

Maximum substrate size of 14” (355.6mm) square substrate
Temperature resolution: 0.1°C
Temperature range: ambient to 300°C (400°C optional)
Temperature uniformity: +/- 0.3% across working surface

RELIABILITY

Exceptional uptime
1-year full warranty on parts and labor
Free remote technical support (phone, email, fax) for the life of the product
Application process assistance for the life of the product

EXHAUST BAKE HOOD DESIGN

Exhausted hood for removal of process chemicals
Optional Nitrogen purge for inert bake environments

DIMENSIONS

18” H x 18.75” W x 26.25” D
Machine Weight: 146 lbs. (66.2 kg)
Shipping Weight: 235 lbs. (106.6 kg)

UTILITIES

Voltage ranges: 208-240 VAC
Power requirements: 3100-4100 watts
Exhaust port: 2” (50.8mm) OD
Vacuum: 20 to 25 inches Hg (67.7 - 84.7 Pa)
Exhaust: 5 to 10 cfm (141.6 - 283.2 1/min)
N2 (for bake plate proximity): 35 psi (241.3 Pa)

DATASTREAM™ TECHNOLOGY: CONNECTING THE SEMICONDUCTOR INDUSTRY

Cee® has released DataStream™ technology on its new Apogee™ tool line. DataStream™ technology gives you access to all of your connected Apogee™ manufacturing equipment in one place to track, access, and modify your systems via a website or mobile app. This technology will give manufacturers the ability to process and visualize data in real time and search and export that data into a number of different formats.

Real-Time Process Information

Constant feedback of process information for monitoring critical process parameters
Streamlined interface between different tool types
Visual cues on process status & health

Advanced Recipe Creation

Seamless switching between basic and advanced recipe creation methods
Plain-English recipe translation
Pre-defined process commands
Unlimited process steps
Unlimited recipe storage

Environmental Monitoring

Monitoring of temperature & humidity allows for stricter control of critical processes
Set preconditions and tolerances for monitored parameters
On-screen, colored visual cues for deviation from controlled specs

Data Logging & Export

Export data logs into commonly readable formats for further analysis and process troubleshooting
Increase process efficiency
Identify process control deviations
Analyze multiple processes for best known method (BKM) development