- PVA roller brushes for post-CMP wafer cleaning
- 200 mm and 300 mm sizes
- Fits AMAT, Lam OnTrak, Ebara and Unipla cleaners
- Sponge and core made as one part
- Held in UK stock by SiSTEM
Purience: PVA Brushes for Post-CMP Wafer Cleaning
Purience makes PVA roller brushes for post-CMP wafer cleaning. The company started in 2022 as an in-house venture of SK hynix and is based in Daegu, South Korea. Its brushes are made in 200 mm and 300 mm sizes for the post-CMP cleaners most fabs already run, from Applied Materials, Lam Research, Ebara and Doosan DND.
After CMP the wafer carries slurry particles, metal residue and organic contamination, and the brush that scrubs it off is in contact with every die on the surface. Purience makes the PVA sponge and its core as one part and develops its material to keep organic and metal contamination from the brush itself low.
SiSTEM Technology supplies Purience brushes in the UK, Ireland and Europe, and we hold Purience brushes in stock in the UK. Tell us the make and model of your cleaner and the brush you use now, and we’ll match the Purience part and can arrange samples so you can qualify it on your own tool. See the Purience PVA roller brushes for sizes and the cleaners they fit.
Brushes for the cleaners you run
200 mm brushes for AMAT Mirra Mesa, Lam Research OnTrak, Ebara F-REX200 and Doosan DND Unipla cleaners. 300 mm brushes for AMAT Reflexion LK and Ebara F-REX300X and F-REX300S2.Brush and core in one part
The sponge and core are made as one integrated part. A strip structure on the core stops slip and keeps moisture even, and a pit design stops the brush rotating idle or twisting.Open-cell PVA
PVA is rigid when dry and soft when wet. Purience's material is hydrophilic with interconnected pores, doesn't shed lint and won't scratch the wafer.Rated for post-CMP chemistry
Purience rates its brushes for the dilute chemistry of a post-CMP clean, including ammonium hydroxide up to 20% and hydrofluoric acid up to 5%. Heat resistant to 80°C wet.Cleaned and inspected before packing
Each brush is cleaned to a particle specification, checked for cleanliness, straightness, roundness and size, then sealed in three layers of packaging.From UK stock
SiSTEM holds Purience brushes in the UK and supplies customers in the UK, Ireland and Europe. Send us your cleaner model and current brush part number.Purience Brushes from SiSTEM
Purience PVA roller brushes in 200 mm and 300 mm sizes, matched to your cleaner by make and model.