Nanotronics

Nanotronics is combining optical microscopy, computational super resolution, artificial intelligence, and robotics to bring the world’s most advanced microscope to every manufacturing sector. From aerospace to electronics to pharmaceuticals, nSpec is reinventing inspection through AI, automation, and imaging techniques.

Optical inspection systems for the world’s most advanced technologies: semiconductors, microchips, hard drives, LEDs, aerospace hardware, nano-fillers, nanotubes, nano-medicine, and more.

Substrate size and type:

• Large panels up to 650mm x 650mm
• Substrate, epi, and patterned wafers
• Photomasks
• Sample fragments
• Transparent & opaque materials

Common features across the various platforms include:

• Multiple resolution settings
• Rapid scanning
• Wafer mosaicing
• Customisable defect reports
• Configuration options for wafer size, defect type, and scan resolution

Whatever the user’s specific sample inspection requirements, Nanotronics provides a wide range of solutions for obtaining rapid results.

nSpec® CPS is the ideal system for highly controlled clean room environments. This system runs multiple scans sequentially.

User-friendly software makes configuring recipes next to effortless. And, as needs evolve, recipes are easy to save and modify.

This 300 mm design supports:

• HEPA air filtration
• Air ionizers
• Automatic load ports

Features:

• Automatic wafer handling
• Multiple resolution settings, ranging from 0.25 μm and greater
• Rapid scanning
• Customizable defect reports
• Settings for single image capture and scans
• Variety of sample chucks to meet specific needs
• Robust analysis for defect or feature of interest detection and classification
• Inspection and review procedures
• Multi-system synchronization
• Small footprint and minimal facilities requirements
• Rack mount controls
• Door interlocks

Whatever the user’s specific sample inspection requirements, Nanotronics provides a wide range of solutions for obtaining rapid results.

nSpec® Turbo is the ideal system for highly controlled, high volume manufacturing environments.

This system runs multiple scans sequentially. User- friendly software makes configuring recipes next to effortless and as needs evolve, recipes are easy to save and modify.

This 300 mm design supports:

• HEPA air filtration
• Air ionizers
• Single or Dual Load Ports (200mm and / or 300mm)

Features:

• Automatic wafer handling
• Multiple resolution settings, ranging from 0.3 μm and greater
• Rapid scanning
• Customizable defect reports
• Flexible settings for single image capture and scans
• Variety of sample chucks to meet specific needs and manual loading applications
• Robust analysis for defect or feature of interest detection and classification
• Inspection and review procedures
• Multi-system synchronization
• Small footprint and minimal facilities requirements
• Rack mount controls
• Door interlocks
• Automatic prealignment by notch or flat
• Mapping for wafer presence, cross slot detection, and double stacked wafers
• 200mm cassette adapter for Load Port
• Filter wheel available (12 slot, 25mm filters)

Whatever the user’s specific sample inspection requirements, Nanotronics provides a wide range of solutions for obtaining rapid results.

nSpec® PS is the ideal system for a research and development or production setting. It runs multiple scans sequentially. User-friendly software makes configuring recipes next to effortless. And, as needs evolve, recipes are easily saved and modifiable.

Fully automated inspection for:

• Substrate, epi, and patterned wafers
• Transparent and opaque wafers
• Diced wafers on film tape, trays, gel-pak or waffle packs
• Photomasks
• Sample fragments

Features:

• Automatic wafer loader
• Multiple resolution settings
• Rapid scanning
• Customizable defect reports
• Settings for single image capture and scans
• Variety of sample chucks to meet specific needs
• Robust analysis for defect or feature of interest detection and classification

Whatever the user’s specific sample inspection requirements, Nanotronics provides a wide range of solutions for obtaining rapid results.

nSpec® LS is the ideal system for R&D and process development. It runs multiple scans sequentially. User-friendly software makes configuring recipes next to effortless. And, as needs evolve, recipes are easy to save and modify.

Semi automated inspection for:

• Substrate, epi, and patterned wafers
• Transparent and opaque materials
• Die on film tape, trays, gel-pak or waffle packs
• Photomasks
• Sample fragments

Features:

• Multiple resolution settings, ranging from 0.25 μm and greater
• Rapid scanning
• Customizable defect reports
• Variety of sample chucks to meet specific needs
• Robust analysis for defect or feature of interest detection and classification
• Inspection and review procedures
• Multi-system synchronization
• Small footprint and minimal facilities requirements
• Rack mount controls
• Field upgradeable to nSpec® PS system