Chuck Cleaning Wafer (CCW)


A Chuck Cleaning Wafer (CCW) is a wafer innovatively coated with a proprietary engineered polymer film, designed to effectively remove particles from chucks while ensuring minimal impact on tool uptime. Key benefits include tool uptime & cost improvement, excursions reduction due to contamination (increase yield), process equipment lifetime extension, and reduced labour costs for maintenance.

Entegris take pride in delivering cutting-edge solutions for the semiconductor industry, and their Chuck Cleaning Wafer (CCW) is no exception. Designed with utmost precision and innovation, Entegris’ Chuck Cleaning Wafers (CCW) are the answer to maintaining the highest standards in front-end semiconductor processing equipment.

The Power of Immaculate Chuck Cleaning Wafers

Semiconductor processing requires an environment of utmost cleanliness and accuracy to ensure flawless results. Entegris’ Chuck Cleaning Wafers (CCW) are engineered to address the critical challenge of particle contamination within processing chucks. These tiny particles, invisible to the naked eye, can significantly impact the performance and reliability of semiconductor devices. With Entegris’ Chuck Cleaning Wafers (CCW), you can now bid farewell to these hidden adversaries.

Unmatched Cleaning Performance

Entegris’ Chuck Cleaning Wafers (CCW) boast a revolutionary cleaning mechanism that meticulously removes contaminants from the chuck surface. This results in improved yield, reduced test errors, and enhanced overall efficiency.

Optimal Material Selection

Crafted from premium materials, these wafers deliver powerful cleaning capabilities. They are designed to withstand multiple cleaning cycles, ensuring long-lasting performance.

Compatibility and Flexibility

The Chuck Cleaning Wafers (CCW) are compatible with a wide range of equipment, making them a versatile choice for semiconductor manufacturers worldwide. CCWs are available for:

  • PVD: CCW solves the backside pressure fault problem caused by particles on the chuck. It also contributes to improvement of thin film uniformity. Fixes chucking errors in less than 5 minutes vs. 12 hour wet clean. CCW can be used >100 times with >75% success reducing Helium leak.
  • Etch: CCW solves Helium leak problem caused by particles on the chuck (customers have >75% success reducing Helium leak with CCW). Fixes chucking errors in less than 5 minutes vs. 8 hour wet clean. CCW can be used >100 times.
  • Lithography: CCW solves the problem of hot spot, which causes defocus defect. Prevents critical focus errors on high-throughput, extremely expensive tools. CCW can be used >100 times with >75% success fixing hot spots. ITS has developed new polymer chemistry that is better at picking up polymer without sticking to advanced lithography chucks. The new PM-PLUS part is very flat and can pick up very small particles.

Ease of Use

Cleaning your chuck is now really simple. Simply load the Chuck Cleaning Wafer (CCW) into the processing equipment, and it will do the rest, efficiently removing contaminants without leaving any residue.

Cost-Effective Solution

By ensuring the optimal functionality of your processing chucks and preventing potential damage caused by particles, Entegris’ Chuck Cleaning Wafers (CCW) offer a cost-effective approach to semiconductor tool uptime.

Enhanced Productivity

With cleaner chucks, you can minimise downtime and reduce maintenance costs, leading to increased productivity and faster time-to-market for your semiconductor devices.

Industry-Leading Quality and Reliability

Entegris is dedicated to providing the highest quality products to their customers. Each Chuck Cleaning Wafer (CCW) undergoes rigorous testing and quality control measures to meet the most demanding industry standards. When you choose Entegris’ Chuck Cleaning Wafers (CCW), you can be confident that you’re investing in a reliable and effective solution.

Unlock the Full Potential of Your Semiconductor Processing

Invest in Entegris’ Chuck Cleaning Wafers (CCW) and elevate your semiconductor processing to unparalleled levels of precision and efficiency. Experience the power of immaculate cleaning and witness the difference it makes in your semiconductor processes. Trust in their expertise and join countless industry leaders who have already taken their processing capabilities to the next level with Entegris’ Chuck Cleaning Wafers (CCW).

Take the first step toward cleaner and more reliable semiconductor processing. Order your Chuck Cleaning Wafers now and revolutionise the way you approach semiconductor processing with Entegris and SiSTEM Technology.

Speak to a specialist

With so many permutations available, the best way for us to help you is for us to know more about what you are trying to achieve. Contact us today for no obligation help, advice and solutions for semiconductor, nanotechnology, biotechnology and any other precision engineering equipment requirements.