FLO-10C-12W Wafer Oven


Discover Precision in Thermal Processing with Fortrend’s FLO-10C-12W Wafer Oven.

The Fortrend FLO-10C-12W Wafer Oven is a pinnacle of high-performance thermal processing technology that melds exceptional cleanliness, reliability, and operational ease for wafers up to 300mm. Tailored to achieve ISO Class 4 (Federal class-10) cleanliness, this oven is adept at safeguarding your processes from contamination, while ensuring impeccable outcomes across a myriad of applications, such as Moisture Removal, Re-Flow, and Single-Layer Thermal Processing.

Versatile Cassette Orientation

The oven accommodates both horizontal and vertical cassettes, ensuring compatibility with diverse application needs.

Innovative Multi-Zone Heating

Through Fortrend’s proprietary multi-zone coordinated heating control technology, achieve remarkable temperature uniformity of ±3.5°C across a broad operating temperature range.

Variable Gas Consumption

With programmable gas consumption ranging from 0 to 50 litres per minute, it allows for adaptable operational efficiency.

Exemplary Cleanliness & Wide-Ranging Applications

Navigate through superior ISO Class 4 cleanliness, making it an impeccable choice for baking processes across Semiconductor Wafers, MEMS, LED, and Touch Panels, ensuring that your products emerge with the utmost integrity and quality.

Seamless Communication & User-Friendly Interaction

Comprehensive Communication Interfaces: Offering SEMI-standard SECS I/II (RS-232) or HSMS/SECS II (TCP/IP) communication interfaces. Real-time performance data can be transmitted to the Host for insightful SPC analysis.

Intuitive GUI

Operate with ease via a 7” touch panel, providing a user-friendly Graphic User Interface (GUI), embellished with soft buttons for simple yet effective control.

Safety & Control

Navigate through an array of control options with soft keys and safety interlocks, ensuring secure yet flexible operation.

Detailed Monitoring & Enhanced Control

  • Vigilant Monitoring: All critical Key Performance Indices (KPI), such as gas flow rate, temperature, pressure, and time, are continuously monitored, ensuring operations persist within desired parameters.
  • Real-time Data Visualisation: With an optional SPC function, visualise logged data in X-R charts, and manage your processes with a data-driven approach.
  • Prompt Notifications: Alarms or warning messages can be relayed to remote hosts or integrated lamps during abnormal operations, ensuring immediate attention to any discrepancies.

Remote & Customisable Operations

  • Remote Interface: An optional remote interface enables operation in remote-auto mode via internet or Ethernet, offering an additional layer of control and flexibility.
  • Programmable Recipes: Engineers can devise temperature profiles for desired processes with the oven’s programmable recipe function, offering up to 99 temperature steps in each recipe.

Embark on a journey of unbridled precision, operational excellence, and exemplary performance with Fortrend’s FLO-10C-12W Wafer Oven – where innovative technology and meticulous design converge to elevate your thermal processing capabilities.

Speak to a specialist

With so many permutations available, the best way for us to help you is for us to know more about what you are trying to achieve. Contact us today for no obligation help, advice and solutions for semiconductor, nanotechnology, biotechnology and any other precision engineering equipment requirements.