Fortrend Engineering: Wafer Handling and Automation

Fortrend Engineering was founded in Silicon Valley in 1979 and is based in San Jose, California, with engineering and manufacturing in China. It introduced the first 200mm SMIF loader, the PLUS 500, and lists more than 170 OEM tool models that run with its SMIF loaders and pod openers. The range covers 200mm SMIF loaders, SMIF pod openers for wafers and reticles, 300mm FOUP load ports, wafer sorters and EFEMs, wafer transfer robots and aligners, vacuum transfer modules, reticle and EUV mask handling, and automated storage and transport.

SiSTEM is Fortrend’s distributor for the UK, Ireland and Europe. We work out the right configuration with you and Fortrend’s engineers, then quote and supply it, and our UK and European team installs, services and repairs it. That covers anything from a single SMIF loader on an older tool to a complete EFEM. Contact us to talk through your tool and your carriers, or see the products below.

Founded in 1979Fortrend has supplied 200mm SMIF automation since 1985 and holds more than 30 US and international patents.

SMIF for older toolsPLUS 500 loaders bring open-cassette tools into a SMIF line. Tool mounts with quick-release latches let a loader come off and go back on in 15 minutes or less.

Pod openers for wafers and reticlesPLM openers fit into a tool's front end and open 150mm and 200mm wafer and reticle pods, including SEMI E152 EUV pods.

300mm load ports, sorters and EFEMsSEMI-compliant FOUP load ports, and modular sorters and EFEMs for wafers from 3 to 12 inch, built around Fortrend's own load ports, robots, aligners and software.

Clean inside the toolBuilt-in mini-environments with active filtered airflow keep wafers sealed while they move. Fortrend's sorters reach ISO Class 1 inside the enclosure.

Installed and serviced by SiSTEMOur engineers install, commission and service Fortrend equipment across the UK, Ireland and Europe, and handle repairs and spares with Fortrend.