Fortrend 300mm Load Port (FOUP Opener)
The Fortrend 300mm load port
Fortrend’s 300mm load port opens a FOUP at the front of a process tool, sorter or EFEM and maps the wafers inside. Fortrend designs it and builds it in its own production plant, and the key parts of the design are Fortrend’s own patents. Its mapping system checks every slot and picks up stacked and tilted wafers before the robot reaches in.
SiSTEM is Fortrend’s distributor for the UK, Ireland and Europe. We supply load ports for new tools and EFEMs and as replacements, and our engineers install, repair and refurbish them on site.
Repair, refurbishment and replacement
A load port that won’t open, mis-maps or loses its host link stops the tool behind it. Our UK and European service team repairs and refurbishes Fortrend load ports on site with parts from Fortrend. We can also replace an existing load port on a SEMI BOLTS interface with a current Fortrend unit. Tell us the tool, the load port model and the fault, and we’ll come back with a plan and a quote.
Standards
Built to SEMI E15.1, E47.1, E57, E62, E64, E83, E110, S2 and S8, and mounts to both the SEMI E63 BOLTS-M and E92 BOLTS-Light interfaces.
Specification
- SEMI 300mm FOUP, with 200mm FOUP as an option
- 1349mm high, 472mm wide and 586mm deep; 66kg, depending on configuration
- Load height 900mm ±10mm
- Opens a FOUP in 11 seconds with mapping and closes it in 8
- 24VDC, 5A, 120W
- RS-232C and parallel I/O, Fortrend HEX protocol
- Clean dry air at 0.5 to 0.6 MPa and vacuum below -80 kPa; N2 at 0.1 to 0.2 MPa for purge
- Options: N2 purge, E84 for AMHS, OHT and AGV delivery, a 200mm cassette adaptor, info pad sensing, and RFID at 134.2kHz
Frame load port
A version for back-end packaging and test takes CKplas and Gudeng frame FOUPs, with the same mapping and E84 options.
To quote we’ll ask about
- The tool or EFEM, and its load port interface
- 300mm or 200mm FOUPs, or frame FOUPs
- E84, N2 purge and ID requirements
- For a repair, the load port model and the fault
