Opens 150mm SEMI E111 single and E112 multiple reticle SMIF pods. It maps the masks as the pod opens and closes, stops the pod closing on a protruding mask, and reads and writes pod RFID. ISO Class 1, built to SEMI E19.3, E111, E112, E117, S2 and S8 and CE certified, on 24VDC or 100 to 240VAC.
Fortrend PLM SMIF Pod Openers
Fortrend PLM Series SMIF Pod Openers
PLM openers fit into the front end of a process tool or EFEM, or onto a load port adaptor. Each one unlocks a SMIF pod and lifts the shell, leaving the wafers or reticles in a sealed mini-environment where the tool's own robot can reach them. SiSTEM supplies, installs and services PLM openers across the UK, Ireland and Europe.
PLM 150Rx
PLM 150W
Opens 150mm SEMI E19.3 wafer SMIF pods and lifts the cover clear, so the tool’s robot can reach the wafers in their cassette.
PLM 200Rx
Opens 200mm SEMI E100 reticle SMIF pods and the outer pod of SEMI E152 EUV pods, applying 80N to the E152 door as the standard requires. Sensors detect the pod type, the reticle, the EUV inner pod, and the pellicle and its orientation. ISO Class 1, built to SEMI E19.4, E100, E152, E117, S2 and S8 and CE certified, with an RFID reader/writer.
PLM 200W
Opens 200mm SMIF wafer pods holding 200mm cassettes, or 150mm cassettes inside 200mm pods, in under 12 seconds, and closes them in under 10. Four programmable interlocks and a protrusion sensor stop the cover closing on a wafer. Pod guides and an optional E84 board suit OHT and AGV delivery, and it can sit on a 300mm SEMI E63 BOLTS adaptor to make an open station SMIF-compatible. SEMI E19.4, S2 and S8, CE certified.
PLM EUV Dual
Opens both the outer and inner pods of SEMI E152 EUV pods, and standard 200mm E100 reticle pods, applying 80N to the outer door while it unlocks and locks. It detects the pod type, the reticle, the inner pod and the pellicle, with RFID and E84 for OHT delivery. ISO Class 1, CE certified.
PLM Open Cassette
An adaptor plate that lets a PLM 200W take 150mm open cassettes. A pip on the plate triggers the opener’s pod-present sensor when a cassette is placed, and a SMIF pod lid can sit over the plate to keep particles out of the tool during transfers.