Fortrend 200mm Wafer Sorter and EFEM
200mm sorters and EFEMs
Fortrend’s 200mm sorters transfer, sort and merge wafers between carriers, and the same modules form EFEMs that load 200mm process and inspection tools. They take all SEMI-standard 200mm SMIF pods, open cassettes and frame cassettes. A modular enclosure keeps the wafers at ISO Class 1, and Fortrend makes the load ports, robots, aligners and control software itself.
SiSTEM is Fortrend’s distributor for the UK, Ireland and Europe. We specify the layout with you and Fortrend’s engineers, and our team installs and services it. For loading wafers onto inspection microscopes, see the C&D V1020.
Configurations
- Two, three, four or six ports, inline or back-to-back to suit the fab layout
- Single-arm, dual-arm or flipping robots
- Vacuum, edge-grip, contact Bernoulli and non-contact Bernoulli end effectors
- Vacuum or edge-support pre-aligners, with optional front and back OCR
- EFEMs for automated and semi-automated inspection tools, wafer packaging and frame wafers
- The Lamina 2002 EFEM, an ASM-approved upgrade that adds SMIF load ports and automatic loading to the ASM E2000
To quote we’ll ask about
- Wafer sizes and thickness, and any thinned, bonded or framed wafers
- The carriers on each side, and how many ports
- What the sorter needs to do: transfer, merge, flip or read IDs
- How it will talk to your host
