Fortrend 300mm Wafer Sorter and EFEM
300mm sorters
Fortrend’s sorters transfer, sort and merge wafers from 3 to 12 inch, between 100µm and 1,500µm thick. They take all SEMI-standard FOUPs, FOSBs, SMIF pods and open cassettes. Standard models run two, three or four load ports, and dual-sided layouts take up to eight. Inside, the modular enclosure keeps the wafers at ISO Class 1.
SiSTEM is Fortrend’s distributor for the UK, Ireland and Europe. We specify the sorter with you and Fortrend’s engineers, and our team installs and services it. For 200mm SMIF and frame cassettes, see the 200mm sorter.
Specification
- At least 700 wafers an hour without aligner and OCR, and 300 with them
- Positioning repeatability ±0.1mm
- OCR top or bottom, reading bare wafers with at least 99.8% accuracy
- Wafer breakage rate no more than one in a million
- Uptime at least 99%, MTBF at least 4,000 hours, MTTR no more than 2 hours
- Single-phase 220VAC, about 3.5kW depending on configuration
- RJ45, with ASCII, HEX or HSMS and SECS II, and SECS/GEM
- Footprint 1605mm long with two ports, 2155mm with three and 2600mm with four; 1237mm wide and 1886mm high
- Options: N2 purge load ports, a safety curtain and a wafer flipping mechanism
Sorters built to order
Fortrend also builds sorters for Taiko wafers and for packaging lines, and changes standard layouts where a process needs it.
300mm EFEMs
The same load ports, robots and aligners form EFEMs for metrology, ion implant, epitaxy, PVD, CVD and etch, lithography, CMP and bonding tools, and for frame wafers.
To quote we’ll ask about
- Wafer sizes and thickness, and any thinned, Taiko, bonded or framed wafers
- The carriers and the number of ports
- Throughput, and whether you need alignment, OCR or flipping
- Host communication and any N2 purge
