SMIF loading for the ASM A400
The PLUS 500F loads 200mm cassettes from SMIF pods onto multi-level or high cassette stages, turning each cassette through 180° after it is picked up. ASM approves it as the SMIF pod loader for the A400 Classic and A400 DUO vertical furnaces, where it loads the furnace’s three-level internal carousel. It mounts directly to the existing ASM SMIF mount, so it can replace an existing A400 SMIF loader in the same position.
SiSTEM is Fortrend’s distributor for the UK, Ireland and Europe, and our engineers install and service the PLUS 500F on site. For other open-cassette tools, see the PLUS 500 range.
Features
- ISO Class 2 or better inside the mini-environment, with active self-cleaning airflow
- The pod shell lifts away and leaves the cassette sealed in the mini-environment
- All-electric, with application software that can be set up in the field
- Sensors for pod present, cassette present and wafer protrusion, plus slot mapping for present and cross-slotted wafers
- Teach pendant, with an optional universal floor mount
- Optional RFID or IR reader/writer
Specification
- 200mm pods and wafers
- 710mm wide, 660mm deep and 1770mm high; 185kg
- Robot arm payload 8kg, load height 764 to 1234mm, reach 250mm
- Load repeatability ±0.05mm, mounting repeatability ±0.25mm
- Load and unload each under 60 seconds
- 100 to 240 VAC at 10A, 50/60 Hz
- RS-232C with SECS I/II, parallel I/O to SEMI E23, and an external EMO
- SEMI E19.4, S2 and S8, and CE certified
- Under 75 dBA; 0 to 40°C and 5 to 90% humidity, non-condensing
To quote we’ll ask about
- A400 Classic or DUO, and how many furnaces
- Whether the loader replaces an existing SMIF loader or is a new installation
- Your lot ID system: RFID, IR or none
