Nexus Chemical/Solvent Heater
The Nexus Inline Chemical/Solvent Heater, a groundbreaking addition to Process Technology’s product lineup. Building on the strengths of the popular SHC series, the Nexus elevates process heating to new heights. It’s ingeniously designed to manage multiple chambers with a single heater, making it a perfect fit for advanced semiconductor wafer cleaning processes that demand precision and safety.
Manage up to four process chambers with just one set of controls, significantly reducing complexity and streamlining your operations.
Its small footprint makes it an ideal solution for space-constrained environments, allowing for efficient use of valuable workspace.
Designed for High Performance
The Nexus ensures precise and stable temperature control across multiple chambers, essential for uniform processing and high-quality outcomes.
Low Watt Density
A design focused on low watt density keeps surface temperatures lower, enhancing safety and prolonging the life of the heater.
Engineered for Safety
Safely heats chemicals and flammable solvents through indirect contact. The patented purged housing for leak detection adds an extra layer of security.
With an o-ring free and crevice-free design, the Nexus eliminates common sources of contamination. The all-PFA wetted surface is ideal for handling various acids and solvents, ensuring integrity and purity.
Acids, Bases, Water & Solvents
Up to 275 kPa (40 PSI)
500W to 2000W
120-600 volts, single phase
- Semiconductor Wafer Cleaning
- Tailored to meet the stringent requirements of semiconductor wafer cleaning, the Nexus provides uniform, controlled heating essential for this precise application.
The Nexus Inline Chemical/Solvent Heater represents a significant leap forward in process technology for the semiconductor industry. It stands as a testament to Process Technology’s commitment to innovation, safety, and efficiency. With its ability to manage multiple chambers seamlessly and its advanced design features, the Nexus is more than just a heater – it’s a comprehensive solution that simplifies complex processes while maintaining the highest standards of performance and cleanliness. Choose the Nexus for a smarter, safer, and more efficient approach to semiconductor wafer cleaning.