Nexus Chemical/Solvent Heater
One heater for several process loops
The Nexus is Process Technology’s multi-loop heater. It uses the indirect heating of the SHC to heat up to four process chambers from one heat source, with one set of controls, which helps match the temperature from chamber to chamber.
Every wetted surface is PFA, so it handles acids and flammable solvents as well as water and bases. The design is o-ring free and crevice free, the housing is purged for leak detection, and the low watt density keeps surface temperatures down.
Specifications
- Wetted materials: PFA, no o-rings
- Process loops: up to four
- Voltage: single phase
- Pressure: up to 275 kPa (40 psi)
- Connections: low-flow and high-flow versions, 6.3 mm inlets and 3.1 mm outlets
- Certifications: CE, UL 499
Where it’s used
Semiconductor wafer cleaning tools with several chambers running the same chemistry. For a single loop, see the SHB/SHC; the full range is on our inline DI water and chemical heaters page.
SiSTEM supplies, installs and provides spares for the Nexus across the UK and Ireland. Contact us with the number of chambers, your chemistry and the temperature you need.
