V1020 Microscope Wafer Loader

Automated microscope wafer loading

The V1020 moves wafers from the cassette to the microscope stage and back, so the operator only has to inspect. While one wafer is under the microscope, the next is centred, aligned to its flat or notch and checked at an intermediate station. The dual-arm robot swaps the two as soon as the operator finishes, and C&D rates the V1020 at more than 200 wafers an hour.

SiSTEM is C&D’s distributor for the UK and Ireland. We specify and quote the loader with you, and our after-sales team installs and supports it.

At the intermediate station

Top and backside macro inspection, bright light inspection and OCR reading all happen here, before the wafer reaches the microscope.

At the microscope

The wafer sits on an XY stage with a vacuum chuck that rotates through 360 degrees, driven by a motorised stage. A programmable five-button speedhandle fits to the microscope stage for manual navigation. The V1020 works with most microscopes.

Recipes

Engineers set up recipes in seconds. Each one holds the wafer selection, inspection and return angles, flat or notch alignment, rotation speed and wafer direction, and operators run them from a touchscreen.

Ergonomics and specification

An optional tilted cassette platform takes the strain off wrists and hands during loading. One cassette serves both loading and unloading, with SMIF loading as an option. The V1020 has cassette mapping, exports defect results as KLARF files, and is SECS/GEM compliant and CE certified. Footprint is 38″ x 30″, and it needs vacuum at 25″ Hg.