P8000 Linear Coat and Develop Track
The C&D P8000 linear track
The P8000 is a recipe-driven linear track for coating and developing 50mm to 200mm wafers. Every P8000 is built new, with parts that have gone obsolete designed out. Wafers move in series from a SEMI-standard indexer through coater, developer, hot plate, chill plate and vapour prime modules, and a two-track P8010 doubles the capacity in one frame. C&D’s smartPro control system runs it from a Windows PC, with expanded recipe storage, real-time monitoring of process parameters, data logging and a manual exercise mode for troubleshooting and preventive maintenance. SiSTEM is C&D’s distributor for the UK and Ireland. We specify and quote each track with you, and our after-sales team installs and supports it.
Modules
- Coater: 50 to 9,500 rpm in 10 rpm steps, with an optional brushless motor and digital controller; up to four dispenses; top and bottom edge bead removal
- Developer: same spin range; stream and spray nozzles
- Hot plate: up to 300°C, or 400°C as an option; uniformity ±0.5% from 50°C to 300°C; contact or fixed and programmable proximity bake
- Chill plate: house chilled water, or a high-efficiency chiller holding ambient ±0.1°C
- Vapour prime: 25°C to 190°C, with programmable or fixed proximity bake
- Scrubber and lift-off: high-pressure spray combined with brush cleaning
- Transfer arm: end-point placement held within ±0.1mm over 300,000 wafers
Options
A vapour atmosphere on the dispense arm to stop resist drying, custom chemical cabinets, a full top enclosure, dual-size bridging without hardware changeover, sub-micron capability, high-performance motors, flood exposure and SECS/GEM. The P8000 is CE marked.
To quote a P8000 we’ll ask about
- Wafer sizes and materials
- Resists, developers and bake steps
- Throughput, and the space and facilities available
