MV Multi-Trap Vacuum Trap
Three-stage vacuum pump trap for heavy process loads
The MV Multi-Trap is Mass-Vac’s high-capacity, high-conductance trap for vacuum pump inlet or exhaust lines. It protects oil-sealed and dry pumps from abrasive particles and corrosive chemicals, on processes that load a pump heavily, such as LPCVD, PECVD, ALD, MOCVD, metal etch and HVPE in semiconductor and compound semiconductor fabs, crystal growing and plastic extrusion.
Three stages in one body
Gas enters a first stage that knocks down heavy particles and condenses volatile solids and liquids on large surfaces. Stages two and three hold parallel banks of filter elements, chosen for the process, which take out corrosive chemicals and fine particles. If you’d rather run larger elements, any Multi-Trap can be set up with one stage of 9.5″ elements in place of two stages of 4.5″ (model numbers ending S). The elements are listed on the filter elements page.
Cooling
A water or refrigerant cooling module replaces the base of the trap and passes the gas over cooling coils before the filter stages, so more of a hot effluent stream condenses out. The 12″ trap is also available with a fully cooled filter assembly, and cooling options with a drain plug suit processes that condense liquid.
Sizes and ports
| Body | Ports | Elements (4.5″) | Models |
|---|---|---|---|
| 10″ (254 mm) | NW40, NW50 or ISO-63 | 5 + 5 | 355040, 355050, 355063 |
| 12″ (305 mm) | ISO-80 or ISO-100 | 6 + 6 | 355080, 355100 |
| 12″, cooled filter assembly | ISO-80 or ISO-100 | 5 + 5 | 355082, 355102 |
| 16″ (406 mm) | ISO-160 | 8 + 8 | 355160 |
Bodies are 304 stainless steel and right-angle as standard, with straight-through versions (inlet at the bottom) of the 10″ and 12″ traps. Stacking modules add capacity to the 10″ and 12″ traps. Mass-Vac rates conductance at about 600 CFM at 1 Torr for the 10″ body, 800 CFM for the 12″ and over 2,000 CFM for the 16″.
High-capacity particle filter
For processes that make a lot of particulate, such as LPCVD, PECVD and ALD in wafer fabs, the 16″ Multi-Trap can take a single pleated polyester filter, 13″ high and 14″ in diameter, with 40 sq ft of surface area. It comes in 25 and 100 micron ratings at 99% particle efficiency. A filter shield and a retrofit kit for existing installations are available.
Extruder vent lines
Vacuum pumps on extruder vents draw volatiles and moisture from the barrel, and those volatiles build up in the pump. A Multi-Trap in the vent line catches them first. A typical package is a 10″ trap with NW50 ports set up for 9.5″ stainless steel gauze elements, with a drain plug, adapters and clamps; drains and float switches can be added where condensate collects.
What we need for a quote
The process and what it puts into the line, the pump make and model, the line size and flange, and whether the trap goes on the inlet or the exhaust. Mass-Vac’s Multi-Trap questionnaire covers it, and we can send it over.
