ChemHeat Chemical Heater
Compact fluoropolymer chemical heater
ChemHeat is Process Technology’s small-footprint inline heater for non-flammable wet-process chemistries at ultra-high purity. The chemistry stays inside PTFE tubing, the flow path is all PFA and PTFE with no wetted o-rings, and the heater is assembled in a cleanroom.
A patented purge detects any breach in the fluid path and stops chemical permeation, which extends the heater’s life. The internal volume is low, so it heats up fast, and the modular design retrofits to existing tools with a choice of inlet and outlet connections.
Specifications
- Wetted materials: PFA and PTFE, no o-rings
- Power: 2 kW to 6 kW
- Voltage: 120 V to 480 V, single or three phase
- Pressure: up to 475 kPa (69 psi) at 95°C; 324 kPa (47 psi) with 1 inch Flaretek connections
- Connections: Flaretek or Super 300 Type Pillar, 3/8 inch to 1 inch
- Size: 225 x 508 x 147 mm
- Certifications: CE, UL 499, CSA C22.2 No. 88, SEMI S2
Where it’s used
Acids, water and bases in semiconductor wet processing, sterilisation and cleaning, surface finishing and filtration loops. For higher power in a fluoropolymer heater, see the TIH; the full range is on our inline DI water and chemical heaters page.
SiSTEM supplies, installs and provides spares for the ChemHeat across the UK and Ireland. Contact us with your chemistry, flow and temperature.
