HCQ Quartz Chemical Heater
All-quartz inline chemical heater
The HCQ is Process Technology’s inline heater for SC1, SC2 and other quartz-compatible chemistries. Every wetted part is high-purity quartz, so there’s no ionic or bacterial contamination, and infrared halogen lamps give an instant start and a fast response as flow changes.
The lamp element plugs in and can be replaced in about ten minutes without opening the fluid connections, so the chemistry and the qualification stay undisturbed. A PTFE housing acts as secondary containment, the tangential flow pattern leaves no dead zones, and the heater is self-draining and self-venting when installed correctly.
Specifications
- Wetted materials: 100% high-purity quartz, no o-rings
- Power: 0.75 kW to 12 kW
- Voltage: 200 V to 480 V, single or three phase
- Temperature: up to 185°C
- Pressure: up to 345 kPa (50 psi)
- Flow: up to 100 litres a minute
- Connections: 3/4 inch MNPT flared quartz
- Purge: clean dry air or nitrogen, 3.5 SCFM minimum
- Reliability: MTBF over 20,000 hours, element change about 10 minutes
- Certifications: ETL to UL 499, CE, SEMI S2
Where it’s used
Semiconductor wafer cleaning baths running SC1, SC2 and other chemistries that quartz handles. For fluoropolymer flow paths, see the TIH; the full range is on our inline DI water and chemical heaters page.
SiSTEM supplies, installs and provides spares for the HCQ across the UK and Ireland. Contact us with your chemistry, flow and temperature.
