SHX Inline Solvent Heater

Process Technology

Ultra-pure heater for IPA and flammable solvents

The SHX is Process Technology’s ultra-high-purity inline heater for IPA and other low flash-point solvents. The chemistry stays inside high-purity PTFE with no contact with metal and no wetted o-rings, and the heater is assembled in a Class 100 cleanroom.

Heating is indirect, with the element isolated from the fluid path. The low watt density lets IPA be heated close to its boiling point without gassing, redundant sensors monitor the temperature, and a purge gives early warning of any fluid-path breach. The low-mass design heats up quickly with little overshoot and follows changes in flow.

Specifications

  • Wetted materials: PTFE
  • Power: 3, 6, 9 or 12 kW
  • Voltage: 200 V to 480 V, single or three phase
  • Temperature: up to 90°C
  • Pressure: up to 475 kPa (69 psi)
  • Minimum flow: 2 litres a minute
  • Internal volume: 0.9 litres
  • Size: 556 x 190.5 x 203 mm, vertical mounting
  • Certifications: UL 499 (ETL); explosion-proof versions available for hazardous areas

Where it’s used

Semiconductor wafer cleaning and drying with IPA and flammable solvents. For solvents at higher power in stainless steel, see the Frontier; the full range is on our inline DI water and chemical heaters page.

SiSTEM supplies, installs and provides spares for the SHX across the UK and Ireland. Contact us with your solvent, flow and temperature.

SHX Inline Solvent Heater
Brochure & Configurations

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