TIH Chemical Heater
Heavy-wall PTFE inline chemical heater
The TIH is Process Technology’s fluoropolymer inline heater for acids, water and bases, single pass or recirculating. The chamber and heater sheath are heavy-wall PTFE for high temperature and pressure, and every wetted surface is PFA or PTFE.
A patented purge of clean dry air or nitrogen runs between the grounded element and the PTFE sheath, removing chemical permeation and minimising ionic contamination for a longer life. Redundant temperature sensors protect the heater, and several plumbing layouts let it fit different tools.
Specifications
- Wetted materials: PFA and PTFE
- Power: 1 kW to 18 kW
- Voltage: 200 V to 600 V, single or three phase (12 kW and above three phase)
- Pressure: up to 689 kPa (100 psi), depending on configuration
- Connections: 6 to 25 mm flared, 12 to 25 mm Super 300 Type Pillar
- Size: 225 x 508 x 147 mm
- Certifications: CE, UL compliant, SEMI S2
Where it’s used
Semiconductor and solar wafer cleaning and general inline chemical heating. The TIH isn’t for solvents; for those, see the SHX or Frontier. The full range is on our inline DI water and chemical heaters page.
SiSTEM supplies, installs and provides spares for the TIH across the UK and Ireland. Contact us with your chemistry, flow and temperature.
