Purience PVA Roller Brushes for Post-CMP Cleaning
Purience PVA roller brushes scrub slurry particles and residue from the wafer after chemical mechanical planarisation. They’re made in 200 mm and 300 mm sizes for the post-CMP cleaners most fabs already run, and SiSTEM Technology supplies them from UK stock to customers in the UK, Ireland and Europe. Purience is a South Korean consumables maker that started in 2022 as an in-house venture of SK hynix.
Which brush fits your cleaner
| Wafer size | Cleaner | Brush, mm (outside diameter x core x length) | Purience part number |
|---|---|---|---|
| 200 mm | AMAT Mirra Mesa | 70 x 31 x 218 | IC70-AM31-H218-P |
| 200 mm | Lam Research OnTrak | 60 x 32 x 241 | IC60-ON32-H241-P |
| 200 mm | Doosan DND Unipla | 60 x 32 x 254 | MC60-UN32-H254-P |
| 200 mm | Ebara F-REX200 | 38 x 18 x 218 | MC38-EB18-H218 |
| 300 mm | AMAT Reflexion LK | 70 x 31 x 319 | IC70-AL31-H319-P, MC70-AL31-H319-P |
| 300 mm | AMAT Reflexion LK | 70 x 31 x 318 | IC70-AL31-H318-C |
| 300 mm | Ebara F-REX300X | 60 x 32 x 309 | IC60-EX32-H309-P, MC60-EX32-H309-P |
| 300 mm | Ebara F-REX300S2 | 38 x 18 x 310 | MC38-ESS18-H310-P |
If your cleaner isn’t listed, send us its make and model and the part number of the brush you use now. Purience also makes brushes to customer requirements.
Brush and core in one part
Purience makes the PVA sponge and its core as one integrated part. The core carries a strip structure that stops slip and keeps moisture even along the brush, and a pit design that stops the sponge rotating idle on the core or twisting.
The PVA
PVA is rigid when dry and soft when wet. Purience’s material is hydrophilic with interconnected open cells, and Purience controls pore size and shape in manufacture. It doesn’t shed lint, it won’t scratch the wafer surface and it’s heat resistant to 80°C wet and 120°C dry. Porosity is 88 to 90% on 200 mm brushes and 90% on 300 mm.
Chemical resistance
The maximum concentrations Purience rates the brush for:
| Chemical | Up to | Chemical | Up to |
|---|---|---|---|
| Acetic acid | 3% | Hydrogen peroxide | 5% |
| Acetone | 20% | Isopropanol | 8% |
| Ammonium hydroxide | 20% | Methanol | 20% |
| Citric acid | 10% | Methyl ethyl ketone | 10% |
| EDTA | 10% | Phosphoric acid | 5% |
| Ethanol | 10% | Sodium hydroxide | 5% |
| Hydrochloric acid | 3% | Sulfuric acid | 5% |
| Hydrofluoric acid | 5% |
Tetrahydrofuran attacks the brush, and xylene hardens it slightly.
Cleaned and inspected before packing
Each brush is cleaned to a particle specification, then checked for particle cleanliness, straightness, roundness and size. It’s sealed in three layers of packaging, and the seal is inspected last. Purience’s product guide, in the downloads below, lists the ion and metal contamination levels for the brush in parts per billion.
Where they’re used
Post-CMP cleaning from front end to back end of line and in packaging, plus photomask cleaning and substrate reclaim. Purience also lists uses in display manufacturing and thin film coating. Our post-CMP cleaning page covers brush and megasonic cleaning side by side.
Ordering and samples
We hold Purience brushes in stock in the UK. If you’re changing brush supplier, we can arrange samples so you can qualify the brush on your own cleaner first. Send us the cleaner make and model, the brush you use now and roughly how many you use a month, and we’ll come back with the matching part and a quotation.
