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Entegris: Probe Card Cleaning and Chuck Cleaning Wafers

Entegris is a US materials company, based in Billerica, Massachusetts, that supplies specialty materials and contamination-control products to the semiconductor industry. SiSTEM distributes one part of that range in the UK and Ireland: Entegris’s Advanced Cleaning Materials. These are the probe card cleaning materials and chuck cleaning wafers first developed by International Test Solutions (ITS) of Reno, Nevada.

Probe card cleaning materials keep probe tips free of debris during wafer test, so contact resistance stays stable and the card lasts longer between off-line cleans. Chuck cleaning wafers take particles off the chuck inside a process tool or prober, so a backside pressure fault or a helium leak can be cleared without opening the chamber. Our chuck cleaning wafers application page explains where they fit.

We’ve supplied these materials to wafer fabs and test floors in the UK and Ireland since 2007. We quote and supply the full range, keep the most-used parts in stock in the UK, and can match an old ITS part number to the current Entegris code.

Probe card cleaning

Abrasive polymer films, lapping films and foams that remove debris from probe tips, on-line in the prober or off-line at the bench. Grades suit cantilever, vertical and MEMS probe cards, supplied as wafers, A4 sheets or cut parts.

Chuck cleaning wafers

Silicon wafers with a soft polymer coating that picks particles off a chuck as the wafer runs through the tool like a production wafer. Used on etch, deposition and lithography chucks and on prober chucks.

Formerly ITS

The range was developed by International Test Solutions, which joined Entegris when Entegris acquired CMC Materials in 2022. Older ITS part numbers still appear on requisitions, and we can match them to the current Entegris codes.

Stock in the UK

We hold the most-used probe cleaning films, chuck cleaning wafers and particle removal film in stock, so most repeat orders ship from the UK.

Choosing a material

The right material depends on the probe card, tip shape, pad metal and test temperature. Tell us what you run and how you clean it now, and we'll suggest a starting point and arrange samples where Entegris offers them.

UK and Ireland

SiSTEM distributes Entegris's Advanced Cleaning Materials in the UK and Ireland. For other Entegris products, or if you're outside that territory, please contact Entegris directly.

Products from Entegris