Wafer and Reticle Handling and Automation

Fortrend wafer and reticle handling equipment, supplied, installed and serviced by SiSTEM across the UK, Ireland and Europe. It covers most of the steps between a carrier and a process tool:

• 200mm SMIF loaders that move cassettes from SMIF pods onto open-cassette tool stages, including the PLUS 500F for ASM A400 furnaces
• SMIF pod openers for 150mm and 200mm wafer and reticle pods, including EUV pods
• 300mm FOUP load ports to SEMI standards, with E84 and N2 purge options, plus repair and refurbishment
• 200mm and 300mm wafer sorters and EFEMs, for sorting and transfer and as the front end of a process tool
• Wafer transfer robots and pre-aligners, vacuum transfer modules and reticle and EUV mask handling, with stockers and mobile robots on request

Much of this work is fitting existing tools to the way a fab moves its wafers. It might mean bringing an open-cassette tool into a SMIF line, adding FOUP load ports to an EFEM, or setting up a sorter for thin or framed wafers. Tell us the tool, the carrier and the wafer, and we’ll work out the configuration with Fortrend’s engineers.

For loading wafers onto inspection microscopes, see the C&D V1020 microscope wafer loader.