V2000 Bright Light Inspection System
Bright light macro inspection
Many lithography defects show up faster under bright light than under a microscope. The V2000 holds each wafer on a three-axis tilt-and-rotate gimbal chuck inside a light-controlled housing, so the operator can find them by eye without eyestrain. Defects found this way can then go to the microscope, and C&D reports customers cutting microscope inspection in the lithography area by up to 90%.
SiSTEM is C&D’s distributor for the UK and Ireland. We specify and quote the system with you, and our after-sales team installs and supports it.
What each light shows
The V2000 takes up to four of these light types:
- Line light: collimated high-angle light that picks out surface particles
- Bright light: resist striations, such as those left by particles before spin coating
- Pink monochromatic light: small stepper focus spots
- Green monochromatic light: photoresist drips
- Bright LED topside light: die damage from process tools
- Soft pink neon light: spin chuck marks and particles
Operation
The V2000 is a dual-cassette system that runs in auto or manual mode. Engineers write the recipes and operators start each run with a single click. Cassette mapping shows what’s in each cassette, and an operator can reject a wafer and store a visual map of it for later. Defects are logged and classified.
Options and facilities
Options include a four-light configuration, backside inspection of the whole underside apart from a small vacuum grip area, dual-size bridging, wafer alignment, ergonomic cassette loading, barcode download and SECS/GEM. For 300mm wafers, C&D builds the same inspection on its S5030 platform. The V2000 needs vacuum at 25″ Hg and 110 or 220V at 15A. It’s CE marked.
