V3000 Macro-Scope Defect Review System
Macro and micro inspection on one system
The V3000 runs the whole defect review on one tool. After wafer alignment and OCR, the central robot takes each wafer to the bright light station. There the operator tilts and spins it on a three-axis gimbal chuck under up to six light types, and marks any scratch, resist striation, particle or hot spot on the touchscreen. The robot then moves the wafer to the microscope, where the motorised stage brings each marked defect under the objective.
SiSTEM is C&D’s distributor for the UK and Ireland. We specify and quote the system with you, and our after-sales team installs and supports it.
Bright light station
- Up to six light sources, each chosen to show a different type of defect
- Three-axis gimbal chuck to tilt, rotate and spin the wafer at set speeds
- Wafer flipping for backside inspection
- A camera captures an image of the whole wafer
Microscope
- Leica DM8000 microscope as standard
- Precision XY motorised stage
- Optional Leica camera and software for line measurement and annotated high-magnification images
Defect records
The system stores wafer IDs with the location and image of every defect, for tracking and analysis. Defects are logged and classified, and results can be exported in KLARF format.
Handling and ergonomics
A central robot with a dual end effector serves two cassettes, with cassette mapping and an angled cassette platform for easier loading. The controls for both stations sit within reach and the displays adjust. Dual-size bridging and wafer alignment are available as options, and SECS/GEM can be added. The V3000 is CE marked.
