Ion Beam Sputter Deposition (IBSD)

Ion beam sputter deposition (IBSD), often shortened to ion beam sputtering or IBS, is a physical vapour deposition method. A broad ion beam from a separate source strikes a target, and the atoms it knocks loose condense on the substrate as a thin film. Because the plasma stays inside the ion source, the chamber runs at low pressure and the substrate sits away from it. The result is films with high density, low particle counts and smooth, stable properties, which is why IBSD is used for precision optical coatings. Intlvac Thin Film builds IBSD systems, and SiSTEM is Intlvac’s partner for the UK, Ireland and most of Europe.

How an IBSD system works

A gridded broad-beam ion source, typically running argon, accelerates ions at energies set between 100 and 1500 eV on Intlvac’s Nanochrome IV IBSD. A water-cooled carousel holds several targets and indexes between them, so a multilayer stack builds in one run. Oxygen or nitrogen can be added to form oxides and nitrides, and a neutraliser keeps the beam quasi-neutral so dielectric targets don’t charge. The substrate rotates at speed to even out the plume, which gives the uniformity optical coatings need.

Ion beam assisted deposition

A second ion source can be aimed at the substrate. Before deposition it pre-cleans the surface, and during deposition it bombards the growing film with low-energy ions, which densifies it and helps control stress and stoichiometry. This is ion beam assisted deposition (IBAD), and the Nanochrome IV IBSD has a secondary ion source for it.

Monitoring the process

Quartz crystal microbalances track deposition rate and thickness. For optical coatings, dynamic optical monitoring follows each layer as it grows, and closed-loop control with optional in-situ tools keeps runs repeatable.

Intlvac IBSD systems

• Nanochrome IV IBSD: substrates up to 250 mm in an electropolished stainless steel HV/UHV chamber, with load lock or batch loading. It has a multi-target carousel, a high-speed rotating stage, IR heat lamps, QCM and dynamic optical control.
• Nanoquest I IBSD Combo: a compact tool that deposits and etches on substrates up to 100 mm. It has a multi-target carousel and a water-cooled stage that rotates and tilts, and it can planarise.

There’s more on the other deposition methods on our thin film deposition page.

Working with SiSTEM

SiSTEM is Intlvac’s partner for the UK, Ireland and most of Europe. We scope your system with you and Intlvac’s engineers, and stay your local contact through quotation, installation and after-sales. Tell us the coatings you need, your substrate sizes and how you monitor them, and we’ll take it to Intlvac.