Wafer, Mask & Reticle Storage & Handling Systems
Founded in 1979 in Silicon Valley, USA, Fortrend has served as an innovative original equipment manufacturer for the Semiconductor and PV industries. For over thirty five years Fortrend products have become the crucial automation connections among different processing equipment.
Fortrend continues to develop its innovative automation technology for extensive use in the semiconductor industry. Fortrend is an industry leader in the design and manufacturing of automated SMIF handling equipment and its SCARA robots.
Reticle Storage and Handling Systems
eRack and N2/XCDA Charger
Supports RF ID, IR and BCR/OCR reader/writer
SECS I / SECS II and TCIP
N2/XCDA Charger protects wafers from oxidation and masks from pollution ( low humidity, low O2, Low NH3+)
Lamina-II series EFEM/Sorter
SEMI E78 ESD “Level 1” standard
Load port options: 150mm and 200mm RSP,
ASML, Nikon, Cannon, HOYA, Toppan, DNP,
TMC, ShinEtsu, DMS, and more
Other options: BCR/OCR reader, IR, RFID reader/writer, Turntable, SECS/GEM Interface
POS 200 - 200mm Reticle SMIF Pod Opener
Barcode reader for Mask ID reading (Optional)
Comparison of Pod ID and Mask ID (Option)
PLM-200 EUV Pod Opener
Opens Standard E100 RSP and EUV E152 Outer Pods Door
Mounts directly into a process tool or to a manual load port adaptor to convert open station to a
SMIF compatible station.
Optional RFID reader/writer
Reticle Shipping box Openers.
Toppan, IBM Blue and DMS type Clam shell type shipping Boxes.
Also Nikon and Canon reticle cartridge openers,
DMS bare mask cartridge openers and lift lid box openers.
All with modular design for easy integration and servicing.
ISO Class 1 cleanliness.
Handling and Automation
Mass wafer transfer systems
One, two, three and four stage systems
Class 1 compatible: <0.1 PWP @ 0.16 microns CE/S2/S8
Options: Boat Inserts, Integrated Notch Finder and Flat Finder, Counter, Vespel Contact Points,
Temperature Sensor, Ionizer, Lexan Side Covers with ESD Coating, Foot Switch, Key Switch,
Green LED, EMO
Applications: Furnace, wet bench, CMP, ion implantation, metrology
PLUS 500 pod load/unload systems
Five diverse PLUS models to meet all SMIF retrofit requirements.
Better than Class-1 cleanliness. Worldwide installations.
All tool designs meet SEMI E-15 SMIF load port interface standards
Sorters and EFEMs
Options include custom end –effectors, dual or single arm Scara robots, flip arm robotics, integrated mapping, pre-aligners, OCR reader and bright light inspection.
InforTrac® Hardware Solutions for Lot ID Tracking System.
Integrated IR Reader/Writer
Automatic tag detection
Supports SmartTag Protocols
Serial and SECS I/II protocols
Support multiple antennas with one reader/writer