Apogee 300 Bake Plate
A bake plate for large substrates, up to 300 mm
The CEE Apogee 300 is a bake plate for wafers up to 300 mm round and squares up to 12″. It runs from ambient to 300°C, or to 400°C as an option, with ±0.3% uniformity across the working surface and 0.1°C resolution. Cost Effective Equipment have served the semiconductor industry since 1987 and build the Apogee in the United States. SiSTEM supplies it across the UK and Europe.
Where it’s used
Apogee bake plates are very popular with universities and research institutes across the UK and Europe, and with spin-out companies setting up their first lithography processes.
Bake methods
The plate bakes by contact, vacuum or proximity, with the proximity gap set by nitrogen or by lift pins. Smart Pins set the substrate height under program control, in 0.1 mm increments over a range of 0 to 19 mm. The plate sizes itself automatically for 100 mm, 150 mm, 200 mm and 300 mm substrates.
Hood and exhaust
The hood is all stainless steel, and its two-layer design keeps the outside cool to the touch. It’s exhausted to carry process fumes away, with an adjustable exhaust gate, and an optional nitrogen purge gives an inert bake environment.
Programming and process data
Recipes take an unlimited number of steps, timed to 0.1 seconds with up to 9,999.9 seconds a step. DataStream logs the temperature data for every run, and recipes and logs move over USB or Ethernet or through a web browser.
Options
The Apogee 300 bake plate comes as a benchtop unit or in a flange or deck-mount configuration. It fits CEE’s X-Pro II workstation, which adds an upper exhaust enclosure for fume control, alongside spin coaters and spin developers. It’s CE marked, and certified by TÜV SÜD’s Nationally Recognized Testing Laboratory for North America.
Specifications
- Substrates: up to 300 mm round; up to 12″ square
- Temperature: ambient to 300°C (400°C optional), resolution 0.1°C
- Uniformity: ±0.3% across the working surface
- Bake methods: contact, vacuum and proximity (nitrogen or lift pins)
- Smart Pin height: 0 to 19 mm, programmed in 0.1 mm increments
- Auto-sizing: 100 mm, 150 mm, 200 mm and 300 mm
- Step time: 0.1 s resolution, 9,999.9 s maximum
- Dimensions: 18.75″ W x 26.25″ D x 17.75″ H (477 x 667 x 451 mm)
- Weight: 146 lb (66.2 kg) excluding accessories
- Power: 208-230 VAC, 50/60 Hz, 3,669 W (16.3 A) maximum
- Vacuum: 20 inHg (33 kPa absolute)
- Nitrogen for proximity baking: 35 psi (241 kPa)
- Exhaust: 2″ OD
Buying through SiSTEM
SiSTEM quotes and supplies the Apogee 300 bake plate in the UK and Europe and handles the one-year parts-and-labour warranty in territory. CEE’s remote technical support and application process assistance run for the life of the tool.
Prices depend on the configuration, mainly the temperature option and mounting, so each system is quoted individually. Send us your substrate sizes and bake temperatures, and we’ll put together a quote for the right set-up.
