Back-Grinding and Bump Tape

D&X

Back-grinding and bump tape for wafer thinning

D&X back-grinding tape covers the patterned front face of a wafer while its back is ground down. It holds strongly enough to keep grinding water and debris out, sits flat for an even grind, and peels away without residue. D&X’s bump tape does the same job on bumped wafers. Both are made in Japan. Our wafer dicing and back-grinding tape page covers the choice between UV and non-UV.

Back-grinding tape

The standard tapes are compatible with conventional back-grinding processes and run from 130 µm to 200 µm thick on a PO base film. The UV types combine high tape thickness accuracy with easy peeling, even on thin wafers, because UV exposure releases the adhesive before the tape comes off. The non-UV types cover general-purpose work, with higher-adhesion versions available.

Bump tape

Bumped wafers need a tape that closes around the bumps and protects them. DX-LCP290Z carries a 140 µm adhesive layer on a 150 µm base, and D&X designs its bump tapes to handle a range of bump sizes, heights and pitches without residue or damage to the bumps. They also give heat resistance and long-term protection of the film.

TapeTypeThickness (µm)Base / adhesive (µm)Adhesion before / after UV (mN/25 mm)
DX-LCP180KUV180PO 150 / urethane 3018,000 / 100
DX-LCP130GXUV130PO 100 / urethane 3013,500 / 90
DX-LCP130GNXNon-UV, general purpose130PO 100 / acrylic 301,200
DX-LCP180LNXNon-UV, higher adhesion180PO 150 / acrylic 301,400
DX-LCP200LNXNon-UV, higher adhesion200PO 150 / acrylic 501,900
DX-LCP290ZUV, bumped wafers290PO 150 / acrylic 14022,000 / 190

Width, length, thickness, hardness and adhesion can be specified to suit your grinder and wafer.

Key features and benefits

  • UV and non-UV back-grinding tapes from 130 µm to 200 µm
  • High tape thickness accuracy for an even grind
  • UV release for easy peeling on thin wafers
  • Bump tape for bumped wafers, with a 140 µm adhesive layer
  • No adhesive residue on the wafer or bumps
  • Made in Japan, inspection sheet with every shipment
  • Short rolls to full production quantities

To ask for samples or a quotation, contact us or request a quote.

Speak to a specialist

With so many permutations available, the best way for us to help you is for us to know more about what you are trying to achieve. Contact us today for no obligation help, advice and solutions for semiconductor, nanotechnology, biotechnology and any other precision engineering equipment requirements.