Specialty Substrates - SOI, Sapphire, Quartz and Glass Wafers
Specialty substrates made to your specification
When silicon isn’t the right base, D&X supplies silicon-on-insulator, sapphire, crystal quartz and glass wafers, each built to the customer’s specification. They’re used in MEMS, photonics, precision optics and packaging. Our semiconductor wafers and substrates page covers the wider range.
SOI wafers
SOI is specified layer by layer, from 2″ to 8″, with a minimum order of one wafer. D&X quotes an average lead time of 9 to 12 weeks.
| Layer | Range |
|---|---|
| Device layer | 0.05 µm to over 300 µm, ± 5%; CZ or FZ; (100), (110) or (111); P, N or intrinsic; 0.001 to over 20,000 ohm-cm; polished |
| Buried oxide | 0.1 µm to 3 µm, ± 5% |
| Handle | 200 µm to 750 µm, ± 5%; CZ or FZ; etched, or polished with oxide |
| Whole wafer | TTV < 5 µm, bow < 20 µm |
Sapphire wafers
Sapphire in C, R, M and A planes, single- or double-side polished, with a 45° edge profile, surface roughness of 0.3 nm Ra or better, TTV of 3 µm or better and warp of 10 µm or better.
| Diameter | Thickness |
|---|---|
| 50.8 mm | 430 ± 25 µm |
| 100 mm | 650 ± 25 µm |
| 150 mm | 1,300 ± 25 µm |
| 200 mm | 1,300 ± 25 µm |
Quartz wafers
Crystal quartz wafers from 50 mm to 150 mm, 300 µm to 1,100 µm thick, in X, Y, Z, AT (35.25°) and ST (42.75°) cuts. Single- or double-side polished, 60/40 surface quality, roughness below 10 Å and TTV below 15 µm. Average lead time 8 to 10 weeks.
Glass wafers
Glass wafers in Borofloat, fused silica, quartz glass, BK7, Eagle XG and soda lime, from 50 mm to 300 mm and from 100 µm thick. Single- or double-side polished, 60/40 surface quality, roughness below 10 Å, with a SEMI flat, a SEMI notch or a round edge. Average lead time 8 to 10 weeks.
Key features and benefits
- SOI from 2″ to 8″, every layer specified, from a single wafer
- Sapphire in C, R, M and A planes up to 200 mm
- Crystal quartz in X, Y, Z, AT and ST cuts
- Glass wafers in six materials from 50 mm to 300 mm
- Single- or double-side polished
- SEMI flat, notch or round edge on glass
To discuss a specification or request a quotation, contact us or request a quote.
