Megasonics

Using high-frequency acoustic energy, our advanced megasonics technology enables tighter control over substrate cleaning processes making them faster and more efficient.
We offer a wide range of solutions for both single wafer and batch cleaning including custom system designs to solve a variety of difficult contamination-sensitive cleaning issues.

The ProSys Bowl Meg is a small Megasonic systems for performing experiments with acoustic energy on very small parts or die. It is compatible with strong acids, bases, and most solvents. It has a 30mm-diameter transducer is easy to install and use and offers inexpensive acoustic process testing.

The MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing of wafers. It applies a uniform dose of acoustic energy to the rotating substrate. The MegPie will improve process efficiency and lower process time. And it is easy to retrofit to your single-substrate processing tool.

Stainless steel, quartz and Kynar® tanks are available in ProSys Megasonic cleaning systems. Small, compact and custom sizes available. Quick dump rinse (QDR) configurations, standard sizes up to 300mm.