- Direct replacements to the OEM part number
- TEL, Kokusai, ASM, Centrotherm, MRL, BTI, SVG/Aviza, Thermco
- New or refurbished from your used element
- Factory burn-in before shipping
- Reverse-engineered from a drawing or sample
- Supplied in the UK and Ireland
DS Fibertech: Diffusion Furnace Heating Elements
DS Fibertech makes heating elements and ceramic fibre insulation for semiconductor diffusion furnaces. It has been building furnace heaters in Santee, California, since 1993, under an ISO 9001:2015 quality system, and its main business is direct replacement elements for vertical and horizontal furnaces from TEL, Kokusai, ASM, Centrotherm, Thermco and the SVG and Aviza range. Each element is built new to the OEM part number, or rebuilt from your used element to the original’s dimensions and electrical characteristics, and can be burnt in at the factory so it’s ready to fit when it arrives.
SiSTEM Technology has represented DS Fibertech in the UK and Ireland since 2008. We quote and supply new and refurbished elements and the parts that go with them. Send us the furnace make and model and the OEM part number of the element, or a drawing for a custom part, and we’ll come back with a price and lead time. The part numbers DS Fibertech covers are on the replacement diffusion furnace elements page.
Direct replacements for OEM furnaces
Elements for TEL, Kokusai, ASM, Centrotherm, Thermco, MRL, BTI and SVG/Aviza furnaces, made to the OEM part number.Refurbishment of used elements
Your element rebuilt with new Kanthal wire, vacuum-formed fibre insulation, end chambers and terminal leads, to the original specification.Burnt in before it ships
Factory burn-in forms the aluminium oxide layer that protects the element wire, so the element can go straight into the furnace.Four heater designs, 350°C to 1,350°C
Vulcan and Hercules for high-temperature work, Mercury for fast ramp and fast cool, and Apollo for low-temperature processes.Torches, vestibules and ceramic fibre parts
Replacement torch elements, vestibule blocks, end chambers, collars and vacuum-formed fibre shapes made to your drawing.Supplied in the UK and Ireland
Quotes and supply from SiSTEM, for new elements and for refurbished ones.Products from DS Fibertech
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Replacement Diffusion Furnace Heating Elements
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Vulcan Semiconductor Diffusion Heater
- Rated to 1,350°C
- Kanthal APM element wire
- Reinforced against sagging at zone interfaces
- Interlocking high-strength ceramic separators
- Crack-resistant end vestibules
- 1,800°C alumina coating against dust
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Hercules Semiconductor Diffusion Heater
- Rated to 1,300°C
- Kanthal A1 element wire
- Reinforced against sagging at zone interfaces
- Interlocking high-strength ceramic separators
- Crack-resistant end vestibules
- 1,800°C alumina coating against dust
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Mercury Semiconductor Diffusion Heater
- 350°C to 1,250°C
- Low mass for fast ramp and fast cool
- Open, recessed helical coil
- Kanthal APM or A1 element wire
- Line-voltage option, no transformer
- Standard terminal leads
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Apollo Semiconductor Diffusion Heater
- Up to 1,000°C
- Designed for fast ramp
- Low-mass Kanthal A1 element wire
- Helical coil for zone uniformity
- Line-voltage option, no transformer
- Standard terminal leads
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Diffusion Furnace Torches, Vestibule Blocks and Ceramic Fibre Parts
- High- and low-flow torch elements
- Replacement torches for TEL, Kokusai, Tempress, Thermco, SVG
- Vestibule blocks and end chambers to 1,500°C
- Toughened outer skin on end chambers
- Alumina-silica collars and heat disks
- Vacuum-formed fibre shapes made to drawing