Replacement Diffusion Furnace Heating Elements
Direct replacement elements for diffusion furnaces
DS Fibertech makes direct replacement heating elements for diffusion furnaces from the major OEMs, and rebuilds used elements to the original specification. Each element is made to the OEM part number, with the original’s dimensions and its electrical and operating characteristics.
New or refurbished
A new element is built from scratch to the OEM part number. A refurbished element is your own element, returned to DS Fibertech and rebuilt. The hard ceramic is cleaned and replaced where needed, and the Kanthal element wire, vacuum-formed fibre insulation, top and bottom end chambers and terminal leads are all replaced. On water-cooled elements the cooling coil and fittings are replaced and the system is pressure-checked. The inner stainless steel shell is replaced if it needs it.
Factory burn-in
DS Fibertech can burn in the element at its factory before it ships. Burn-in forms a grey aluminium oxide layer on the element wire, which strengthens the wire at temperature, protects it against elongation and lengthens its life. An element burnt in at the factory is ready to install when it arrives. If you’d rather burn in on site, we can send DS Fibertech’s procedure, which gives the ramp and soak schedule for each element type.
Part numbers covered
From DS Fibertech’s published list. If yours isn’t here, send it to us with the furnace model: DS Fibertech also reverse-engineers elements from a drawing or a sample.
Tokyo Electron (TEL): 1110-356908-11, 1187-146257-15 (HEC heating element, TEL pyro furnace), 1187-149702-14, 400-917700, B723001, DITEA8668, DS1187-016965-18, DS1187-149702-13, DS1187-149702-14, DS2184-020417-11, DS2187-323542-14, DS2187-323542-19, DS2187-333792-18, DS218H-020278-1A, DS218H-033374-13, DS218H-033374-14, DS518H-001519-16, DS618H-000249-12, VB410.320.54TEL, VMM-35-001APM, VMM-35-002APM, VMM-40-005, VMM-40-101, VMM-40-101APM, VMM-40-102, VMM-40-102APM, VMM-40-104, VMM-56-002, VMM-56-002APM, VMM-56-201, VMM-56-201APM, VMM-56-306, VMU-28-014, VMU-28-014APM, VMU-28-017, VMU-28-017APM, VMU-28-031, VMU-31-001, VMU-40-003, VMU-40-003APM, VMU-40-007, VMU-40-007APM, VMU-40-007EX, VMU-40-007EX2, VMU-40-007EXAPM, VMU-40-007EXT/41, VMU-40-007RTR, VMU-40-007SE, VMU-40-007SEAPM, VMU-40-009, VMU-40-009APM, VMU-40-102EX2, VMU-40-102EXAPM, VMU-40-103, VMU-54-001, VMU-54-001APM, VOS-40-017, VOS-56-002, VOS-56-003, VOS-56-101P, VOS-56-101PT
Hitachi Kokusai: 040-917212, 044-906430, 2962044, 2962079, 2PBTIF47000, 3HOT046402, 3HOT052004, 440919578, 9650700, 9651700, D4EX02648, D4EX02739, D4EX03531, D4EX04882, D4EX19087, D4EX204497, D4EX20739, D4EX22250, D4EX30455-001, D4EX34221-004, F-330C-88V-4Z, F-330C-93V-4Z, T2DD6-18821-40536
ASM: 2307960, 2421801-01, 2579138-01, 2580802-01, 2625458-01, 2713209-01, 2842955-01, 2912414-01, 2947056-01, 2963558-01
Centrotherm: 627396, 099622.201.20.09.1
MRL: 040-082325, 040-800375, 040-82331, 040-906444, 040-917212, 042-817821, 042-818161, 042-915196, 044-0789927, 044-0799107, 044-800207, 044-906360, 044-906430, 044-907349, 044-908906, 044-919578, 044-924638, 3740816554, 400-093646, 400-901802, 400792553, 4020790208, 440787004, 440816786, 440818242, 440818566, X0440786265
BTI: 2962044, 4016647, 4230484, 4230485, 602783-02, 9004700, 9051623, 9051885, 9650851, 9651035, 9651700, 9651765, 9651769, 9651770, 9651771, 9652103, 9652267, 9652268, 9652269, 9652293, 9652649
SVG and Aviza: 4011004, 602783-02, 602783-03 (AVP-8000), 610015-09 (RVP)
Thermco: 165558-001, AD-11033, AD1388DC1300P, AD1389-FC200, AD-1538DCHT500
Axcelis: ST-200
Other OEM models: A133-0001-120, A133-0001-121, A133-0001-122, A133-0001-123, A133-0001-133, A133-0001-134, A133-0001-139, A133-0001-142, A133-0001-144, A133-0001-145, A133-0001-146, A133-0001-147, A133-0001-148, A133-0001-193, A133-0001-194, A133-0001-195, A133-0001-196, A133-0001-197, A133-0001-198, A133-0001-199, A133-0001-201, A133-0004-001, A133-0004-034, A133-0004-035, A133-0004-036, A133-0004-037, A133-0004-038, A133-0004-039, DC-1300, DC-1300PLUS, DCHT-500, F-210V-87, FC-200, FC200L, HDS-610A5-C, UL-260-08H-MK3(W)
What to send us for a quote
- The OEM part number of the element, from its label or the furnace parts list
- The furnace make and model
- New or refurbished, and whether you want factory burn-in
- How many, and when you need them
We’ll confirm price and lead time with the quote. Torch elements and the other parts around the element are on the torches, vestibule blocks and ceramic fibre parts page, and the four DS Fibertech heater designs are Vulcan, Hercules, Mercury and Apollo.
SiSTEM Technology has supplied DS Fibertech elements to fabs in the UK and Ireland since 2008, including TEL mid- and high-temperature elements and AVP-8000 and RVP elements. Contact us with your part number.
