Diffusion Heater Element Replacements
DS Fibertech Corporation offers direct replacements of diffusion heater elements from OEMs, such as:
Tokyo Electron (TEL):
VMM-56-002APM, VMM-56-201APM, VMM-40-101APM, VMM40-102APM, VMU-40-102EXAPM, VMM-35-001APM, VMM-35-002APM, VMU-54-001APM, VMU-40-009APM, VMU40-007APM, VMU-40-007EXAPM, VMU-40-007SEAPM, VMU-40-003APM, VMU-28-017APM, VMU-28-014APM, VOS-56-003, VOS-56-002, VOS-40-017, VMU-40-007, VMU-40-103, VMM-40-101, VMM-40-102, VMM-40-005, VMU-28-017, VMU-54-001
Hitachi Kokusai:
F-330C-88V-4Z, F-330C-93V-4Z, D4EX04882, D4EX03531, D4EX02648
Axcelis:
ST-200
Silicon Valley Group (SVG):
602783-02, 602783-03
Various Other OEM Models:
UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200, FC200L, DC-1300, DC-1300PLUS, DCHT-500
If you are looking for a diffusion heater that is not listed, please contact us
