Product Systems Inc.

Product Systems Inc


Using high-frequency acoustic energy, our advanced megasonics technology enables tighter control over substrate cleaning processes making them faster and more efficient.
We offer a wide range of solutions for both single wafer and batch cleaning including custom system designs to solve a variety of difficult contamination-sensitive cleaning issues.

Bowl Meg

The ProSys Bowl Meg is a small Megasonic systems for performing experiments with acoustic energy on very small parts or die. It is compatible
with strong acids, bases, and most solvents. It has a 30mm-diameter transducer is easy to install and use and offers inexpensive acoustic process testing.
Bowl Meg
Meg Pie

Meg Pie

The MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing of wafers. It applies a uniform dose of acoustic energy to the rotating substrate. The MegPie will improve process efficiency and lower process time. And it is easy to retrofit to your single-substrate processing tool.

Process Tank Options

Stainless steel, quartz and Kynar® tanks are available in ProSys Megasonic cleaning systems. Small, compact and custom sizes available. Quick dump rinse (QDR) configurations, standard sizes up to 300mm.
Process Tank Options

SiSTEM Technology Limited
Grafton Suite
Caswell Science & Technology Park
NN12 8EQ
United Kingdom


+44 (0)1327 317 621

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