Fortrend
Founded in 1979 in Silicon Valley, USA, Fortrend has served as an innovative original equipment manufacturer for the Semiconductor and PV industries. For over thirty five years Fortrend products have become the crucial automation connections among different processing equipment.
Fortrend continues to develop its innovative automation technology for extensive use in the semiconductor industry. Fortrend is an industry leader in the design and manufacturing of automated SMIF handling equipment and its SCARA robots.

Vacuum and Convection Ovens
FLO-10C-12W Thermal Chamber
The SunRay FLO-10C-12W Thermal Chamber is a high
performance ISO Class 4 Cleanliness oven for wafers up to 300mm and temperatures up to 250C ideal for applications such as;
Its superior ISO Class 4 cleanness is suitable for baking processes of semiconductor wafers, MEMS, LED and touch panels.
performance ISO Class 4 Cleanliness oven for wafers up to 300mm and temperatures up to 250C ideal for applications such as;
- Moisture removal
- Re-flow
- Single layer thermal processing
Its superior ISO Class 4 cleanness is suitable for baking processes of semiconductor wafers, MEMS, LED and touch panels.


Wafer Baking Oven System SIO-300-200-2
The Oven system has integrated mini-environment, 300mm
load ports, wafer robot, cassette robot, YES series oven and control unit
200mm cassette manual/auto load available
Fully automatic
Temperature Range: Ambient~250 degree C
Uniformity: ± 3 degree
Cleanness of System: Class 1
Cleanness of Oven: Class 10
N2 bake oven
load ports, wafer robot, cassette robot, YES series oven and control unit
200mm cassette manual/auto load available
Fully automatic
Temperature Range: Ambient~250 degree C
Uniformity: ± 3 degree
Cleanness of System: Class 1
Cleanness of Oven: Class 10
N2 bake oven
High Temperature Vacuum Cure Oven SIO-300-450-1 and SIO-300-450-2( dual chamber)
Fortrend-YES have partnered to develop the SIO-300-450 series of High temperature, Air cooled, Controlled process gas composition, Laminar cross flow, Vertical, vacuum ovens
Process capabilities are;
200mm Wafer auto load available Continuous horizontal lamina flow of N2
Low O2 < 10 ppm
Process temperature range 150~450 °C
Temperature uniformity better than ± 3.5 °C
Maximum heating ramp 8°C/min, and cooling 6°C/min (depends on chamber temperature)
N2 pre-heating
Process capabilities are;
- Polyimide Cure
- BCB cure
- Photoresist Cure
- Copper Anneal
- Copper Oxide Removal
200mm Wafer auto load available Continuous horizontal lamina flow of N2
Low O2 < 10 ppm
Process temperature range 150~450 °C
Temperature uniformity better than ± 3.5 °C
Maximum heating ramp 8°C/min, and cooling 6°C/min (depends on chamber temperature)
N2 pre-heating

Reticle Storage and Handling Systems
eRack and N2/XCDA Charger
Fortrend’s eRack integrated low cost storage solution with ID tracking systems
Supports RF ID, IR and BCR/OCR reader/writer
SECS I / SECS II and TCIP
N2/XCDA Charger protects wafers from oxidation and masks from pollution ( low humidity, low O2, Low NH3+)
Supports RF ID, IR and BCR/OCR reader/writer
SECS I / SECS II and TCIP
N2/XCDA Charger protects wafers from oxidation and masks from pollution ( low humidity, low O2, Low NH3+)
Lamina-II series EFEM/Sorter
Fully automated reticle transfer systems Better than ISO Class 2 cleanliness
SEMI E78 ESD “Level 1” standard
Load port options: 150mm and 200mm RSP,
ASML, Nikon, Cannon, HOYA, Toppan, DNP,
TMC, ShinEtsu, DMS, and more
Other options: BCR/OCR reader, IR, RFID reader/writer, Turntable, SECS/GEM Interface
SEMI E78 ESD “Level 1” standard
Load port options: 150mm and 200mm RSP,
ASML, Nikon, Cannon, HOYA, Toppan, DNP,
TMC, ShinEtsu, DMS, and more
Other options: BCR/OCR reader, IR, RFID reader/writer, Turntable, SECS/GEM Interface
POS 200 - 200mm Reticle SMIF Pod Opener
Fortrend POS-200R is a simple, reliable pod opener designed to open 200mm Reticle SMIF pods by lifting the shell. After Pod Shell lift, operator can pick Reticle out.
Optional SECS/GEM
Barcode reader for Mask ID reading (Optional)
Comparison of Pod ID and Mask ID (Option)
Optional SECS/GEM
Barcode reader for Mask ID reading (Optional)
Comparison of Pod ID and Mask ID (Option)
PLM-200 EUV Pod Opener
ISO Class 1 cleanliness with active self-clean air flow design.
Opens Standard E100 RSP and EUV E152 Outer Pods Door
Mounts directly into a process tool or to a manual load port adaptor to convert open station to a
SMIF compatible station.
Optional RFID reader/writer
Opens Standard E100 RSP and EUV E152 Outer Pods Door
Mounts directly into a process tool or to a manual load port adaptor to convert open station to a
SMIF compatible station.
Optional RFID reader/writer
Reticle Shipping box Openers.
Models available to open Pozzetta, Entegris,
Toppan, IBM Blue and DMS type Clam shell type shipping Boxes.
Also Nikon and Canon reticle cartridge openers,
DMS bare mask cartridge openers and lift lid box openers.
All with modular design for easy integration and servicing.
ISO Class 1 cleanliness.
Toppan, IBM Blue and DMS type Clam shell type shipping Boxes.
Also Nikon and Canon reticle cartridge openers,
DMS bare mask cartridge openers and lift lid box openers.
All with modular design for easy integration and servicing.
ISO Class 1 cleanliness.




Handling and Automation
Mass wafer transfer systems
4”, 5” 6”, 8” and 12” - Small foot print Cassette to Cassette and Back to Back batch wafer transfers
One, two, three and four stage systems
Class 1 compatible: <0.1 PWP @ 0.16 microns CE/S2/S8
Options: Boat Inserts, Integrated Notch Finder and Flat Finder, Counter, Vespel Contact Points,
Temperature Sensor, Ionizer, Lexan Side Covers with ESD Coating, Foot Switch, Key Switch,
Green LED, EMO
Applications: Furnace, wet bench, CMP, ion implantation, metrology
One, two, three and four stage systems
Class 1 compatible: <0.1 PWP @ 0.16 microns CE/S2/S8
Options: Boat Inserts, Integrated Notch Finder and Flat Finder, Counter, Vespel Contact Points,
Temperature Sensor, Ionizer, Lexan Side Covers with ESD Coating, Foot Switch, Key Switch,
Green LED, EMO
Applications: Furnace, wet bench, CMP, ion implantation, metrology
PLUS 500 pod load/unload systems
Retrofit Open-Cassette Tools to SMIF.
Five diverse PLUS models to meet all SMIF retrofit requirements.
Better than Class-1 cleanliness. Worldwide installations.
S2/S8/CE certified.
All tool designs meet SEMI E-15 SMIF load port interface standards
Five diverse PLUS models to meet all SMIF retrofit requirements.
Better than Class-1 cleanliness. Worldwide installations.
S2/S8/CE certified.
All tool designs meet SEMI E-15 SMIF load port interface standards
Sorters and EFEMs
200-300 mm wafer sorters and EFEMs designed for a wide variety of applications including thin and ultra-thin wafer handling.
Options include custom end –effectors, dual or single arm Scara robots, flip arm robotics, integrated mapping, pre-aligners, OCR reader and bright light inspection.
Options include custom end –effectors, dual or single arm Scara robots, flip arm robotics, integrated mapping, pre-aligners, OCR reader and bright light inspection.
InforTrac® Hardware Solutions for Lot ID Tracking System.
Supports 134 kHz and 13.56 MHz RFID Technology
Integrated IR Reader/Writer
Automatic tag detection
Supports SmartTag Protocols
Serial and SECS I/II protocols
Support multiple antennas with one reader/writer
Integrated IR Reader/Writer
Automatic tag detection
Supports SmartTag Protocols
Serial and SECS I/II protocols
Support multiple antennas with one reader/writer
LMS Lot Management System.
LMS is a software system integrating electrically connected racks, RFID lot ID tracking hardware, local area networking database and production information in one connected system.



