- SEMI-compliant 300mm FOUP load port, with a 200mm FOUP option
- Maps every slot for missing, stacked and tilted wafers
- E84, N2 purge and RFID options
- Supplied, installed and repaired across Europe
Fortrend Engineering: Wafer Handling and Automation
Fortrend Engineering was founded in Silicon Valley in 1979 and is based in San Jose, California, with engineering and manufacturing in China. It introduced the first 200mm SMIF loader, the PLUS 500, and lists more than 170 OEM tool models that run with its SMIF loaders and pod openers. The range covers 200mm SMIF loaders, SMIF pod openers for wafers and reticles, 300mm FOUP load ports, wafer sorters and EFEMs, wafer transfer robots and aligners, vacuum transfer modules, reticle and EUV mask handling, and automated storage and transport.
SiSTEM is Fortrend’s distributor for the UK, Ireland and Europe. We work out the right configuration with you and Fortrend’s engineers, then quote and supply it, and our UK and European team installs, services and repairs it. That covers anything from a single SMIF loader on an older tool to a complete EFEM. Contact us to talk through your tool and your carriers, or see the products below.
Founded in 1979
Fortrend has supplied 200mm SMIF automation since 1985 and holds more than 30 US and international patents.SMIF for older tools
PLUS 500 loaders bring open-cassette tools into a SMIF line. Tool mounts with quick-release latches let a loader come off and go back on in 15 minutes or less.Pod openers for wafers and reticles
PLM openers fit into a tool's front end and open 150mm and 200mm wafer and reticle pods, including SEMI E152 EUV pods.300mm load ports, sorters and EFEMs
SEMI-compliant FOUP load ports, and modular sorters and EFEMs for wafers from 3 to 12 inch, built around Fortrend's own load ports, robots, aligners and software.Clean inside the tool
Built-in mini-environments with active filtered airflow keep wafers sealed while they move. Fortrend's sorters reach ISO Class 1 inside the enclosure.Installed and serviced by SiSTEM
Our engineers install, commission and service Fortrend equipment across the UK, Ireland and Europe, and handle repairs and spares with Fortrend.Products from Fortrend
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Fortrend 300mm Load Port (FOUP Opener)
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Fortrend PLUS 500 SMIF Loaders
- Moves 200mm or 150mm cassettes from SMIF pods to tool stages
- Load or unload in under 60 seconds
- Arms for tilt, rotation, side offset and low-door tools
- Installed and serviced by SiSTEM across Europe
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PLUS 500F SMIF Loader for ASM A400 Furnaces
- ASM-approved SMIF loader for the A400 Classic and DUO
- Loads the A400’s three-level internal carousel
- Drop-in replacement on the existing ASM SMIF mount
- Installed and serviced by SiSTEM across Europe
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Fortrend SMIF Pod Openers
- Small footprint
- ISO Class 1 with active self-clean air flow design
- Mapping and RFID readers included
- OHT Compatible
- Meets SEMI standards and CE certified
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Fortrend 200mm Wafer Sorter and EFEM
- Sorts, transfers and merges wafers up to 200mm
- SMIF pods, open cassettes and frame cassettes
- Two to six ports, inline or back-to-back
- Installed and serviced by SiSTEM across Europe
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Fortrend 300mm Wafer Sorter and EFEM
- Sorts and transfers wafers from 3 to 12 inch
- FOUP, FOSB, SMIF pod and open cassette ports
- Up to 700 wafers an hour without aligner and OCR
- Installed and serviced by SiSTEM across Europe
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Fortrend Wafer Handling Robots and Pre-Aligners
- Single- and dual-arm atmospheric robots for 2 to 12 inch wafers
- Wet process, mask, panel and cassette versions
- FPA pre-aligners centre wafers to ±0.1mm
- Supplied, installed and serviced across Europe
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Fortrend Vacuum Transfer Modules (VTM)
- Four- to eight-sided vacuum transfer chambers
- Up to 200mm wafers, with 300mm pentagonal and dual-feed systems
- 200 wafers an hour or more, 98% uptime or better
- Custom chambers and load locks for OEM process tools
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Fortrend Lamina Reticle and EUV Mask Handling
- Lamina reticle sorters and EFEMs at ISO Class 1
- SEMI E100, E111, E112 and E152 EUV pods, and shipping boxes
- Turn/flip, ID reading, inspection and thickness modules
- Supplied, installed and serviced across Europe
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SIO-300-200 Thermal Curing System
- Automated atmospheric curing oven, up to 250°C
- 200mm and 300mm wafers, from FOUPs or cassettes
- Class 10 chamber, ±3.5°C uniformity
- Installed and serviced by SiSTEM across Europe
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FLO-10C-12W Wafer Oven
- Table-top clean oven for wafers up to 300mm
- Ambient +15°C to 250°C, ±3.5°C uniformity
- ISO Class 4, horizontal or vertical cassettes
- Installed and serviced by SiSTEM across Europe
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FVO-450 Vacuum Curing Oven
- Vacuum curing for 200mm and 300mm wafers, 50°C to 450°C
- 50 wafers per chamber, in one or two chambers
- Oxygen below 10 ppm with nitrogen purge
- Installed and serviced by SiSTEM across Europe
